Patent classifications
H01L27/14687
Increased optical path for long wavelength light by grating structure
Some aspects of the present disclosure relate to a method. In the method, a semiconductor substrate is received. A photodetector is formed in the semiconductor substrate. An interconnect structure is formed over the photodetector and over a frontside of the semiconductor substrate. A backside of the semiconductor substrate is thinned, the backside being furthest from the interconnect structure. A ring-shaped structure is formed so as to extend into the thinned backside of the semiconductor substrate to laterally surround the photodetector. A series of trench structures are formed to extend into the thinned backside of the semiconductor substrate. The series of trench structures are laterally surrounded by the ring-shaped structure and extend into the photodetector.
Process and structure of overlay offset measurement
A process of overlay offset measurement includes providing a substrate; forming a first pattern layer with a predetermined first pattern on the substrate; forming a first photoresist layer on the substrate and the first pattern layer; forming a second photoresist layer on the first photoresist layer; forming a second pattern layer with a predetermined second pattern on the second photoresist layer; patterning the second photoresist layer to form a trench having a predetermined third pattern being substantially aligned with the predetermined first pattern of the first pattern layer; and performing overlay offset measurement according to the second pattern layer and the trench.
Multiple spectral detectors using structured perovskite
A detector for electromagnetic radiation is disclosed. The detector includes: a first electrode layer including at least one first electrode pixel and a second electrode pixel. A second electrode and a first layer including at least one first perovskite are situated between the at least one first electrode pixel of the first electrode layer and the second electrode. Further, a second layer including at least one second different perovskite, is situated between the second electrode pixel of the first electrode layer and the second electrode. In another embodiment, a detector for electromagnetic radiation is disclosed where a first layer including at least one first perovskite, is situated between the at least one first electrode pixel of the first electrode layer and the second electrode, and between the second electrode pixel of the first electrode layer and the second electrode. A method for the production is also disclosed.
Epitaxially coated semiconductor wafer of monocrystalline silicon and method for production thereof
A semiconductor wafer comprises a substrate wafer of monocrystalline silicon and a dopant-containing epitaxial layer of monocrystalline silicon atop the substrate wafer, wherein a non-uniformity of the thickness of the epitaxial layer is not more than 0.5% and a non-uniformity of the specific electrical resistance of the epitaxial layer is not more than 2%.
METHOD FOR MANUFACTURING AN IMAGE SENSOR
A method for fabricating an image sensor, comprising: providing a receiver substrate comprising a base substrate and an active layer comprising pixels, each pixel comprising a doped region for collecting the electric charges generated in the pixel, the receiver substrate being devoid of metal interconnections, providing a donor substrate comprising a weakened zone limiting a monocrystalline semiconductor layer, bonding the donor substrate to the receiver substrate, detaching the donor substrate along the weakened zone, so as to transfer the semiconductor layer to the receiver substrate, implementing a finishing treatment on the transferred monocrystalline semiconductor layer, the finishing treatment comprising (i) thinning of the transferred monocrystalline semiconductor layer by sacrificial oxidation followed by chemical etching and (ii) smoothing of the transferred monocrystalline semiconductor layer by means of at least one rapid anneal.
METHOD FOR MANUFACTURING BACK-THINNED SOLID-STATE IMAGING DEVICE
A method for manufacturing a back-illuminated solid-state imaging device includes a first step of preparing a first conduction-type semiconductor layer having a front surface and a back surface, a second step of forming a first asperity region on the front surface of the semiconductor layer by selectively etching the front surface of the semiconductor layer, a third step of forming a second asperity region on the front surface of the semiconductor layer by smoothening asperities of the first asperity region, and a fourth step of forming an insulating layer along the second asperity region and forming a plurality of charge transfer electrodes on the insulating layer.
Solid-state image capturing device and manufacturing method of solid-state image capturing device
A solid-state image capturing device according to the present disclosure includes an image capturing element, a light transmitting member, a support member, a sealing resin member, and a wall member. The image capturing element is mounted on a substrate. The support member is arranged in a part of an outer-peripheral portion of the image capturing element, the outer-peripheral portion surrounding a light receiving unit of the image capturing element. The light transmitting member is supported by the support member. The sealing resin member is arranged in a peripheral portion of the image capturing element. The wall member is provided between the sealing resin member and a part of the outer-peripheral portion of the image capturing element, the part excluding a part in which the support member is arranged.
Image sensor having improved dicing properties
The present technology relates to techniques of preventing intrusion of moisture into a chip. Various illustrative embodiments include image sensors that include: a substrate; a plurality of layers stacked on the substrate; the plurality of layers including a photodiode layer having a plurality of photodiodes formed on a surface of the photodiode layer; the plurality of layers including at least one layer having a groove formed such that a portion of the at least one layer is excavated; and a transparent resin layer formed above the photodiode layer and formed in the groove. The present technology can be applied to, for example, an image sensor.
SYSTEMS AND METHODS FOR GENERATING DEPTH MAPS USING A CAMERA ARRAYS INCORPORATING MONOCHROME AND COLOR CAMERAS
A camera array, an imaging device and/or a method for capturing image that employ a plurality of imagers fabricated on a substrate is provided. Each imager includes a plurality of pixels. The plurality of imagers include a first imager having a first imaging characteristics and a second imager having a second imaging characteristics. The images generated by the plurality of imagers are processed to obtain an enhanced image compared to images captured by the imagers. Each imager may be associated with an optical element fabricated using a wafer level optics (WLO) technology.
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME, AND ELECTRONIC APPARATUS
A semiconductor device is provided as a back-illuminated solid-state imaging device. The device is manufactured by bonding a first semiconductor wafer with a pixel array in a half-finished product state and a second semiconductor wafer with a logic circuit in a half-finished product state together, making the first semiconductor wafer into a thin film, electrically connecting the pixel array and the logic circuit, making the pixel array and the logic circuit into a finished product state, and dividing the first semiconductor wafer and the second semiconductor being bonded together into microchips.