H ELECTRICITY
H01 ELECTRIC ELEMENTS
H01L SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L29/00 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof; ; Multistep manufacturing processes therefor;
H01L29/66 Types of semiconductor device; ; Multistep manufacturing processes therefor
H01L29/68 controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
H01L29/76 Unipolar devices; , e.g. field effect transistors
H01L29/772 Field effect transistors
H01L29/78 with field effect produced by an insulated gate
H01L29/786 Thin film transistors,; i.e. transistors with a channel being at least partly a thin film
H01L29/78603 characterised by the insulating substrate or support