Disclosed examples generally include methods and apparatuses related to microphone units, such as may be found in implantable medical devices (e.g., cochlear implants). Microphone units generally include a microphone element connected to a chamber having a concave floor with the chamber covered by a membrane. Microphone units can be configured to produce an output based on pressure waves (e.g., sound waves) that reach the membrane. In an example, a microphone unit has a pressurized gas within the chamber below the membrane such that, while in a static state, the membrane deflects away from the chamber floor.

The invention relates to a MEMS transducer comprising a vibratable membrane for generating or receiving pressure waves in a fluid in a vertical direction, wherein the vibratable membrane is supported by a carrier and the vibratable membrane exhibits two or more vertical sections which are formed parallel to the vertical direction and comprise at least one layer of actuator material. The end of the vibratable membrane is preferably connected to an electrode, such that the two or more vertical sections can be induced to vibrate horizontally by driving the at least one electrode, or such that an electrical signal can be generated at the at least one electrode when the two or more vertical sections are induced to vibrate horizontally.

A speaker diaphragm includes an edge formed from an elastomer, and a diaphragm body that is to be joined to the edge. A joint between the edge and the diaphragm body includes a melting portion between the edge and the diaphragm body.

The present application provides a method of manufacturing a resonant panel (200) of a flat panel loudspeaker. The method comprises: pressing a resonant panel blank between a first pressing surface (302) and a second pressing surface of a press, whereby to form the resonant panel (200) of the flat panel loudspeaker. The second pressing surface substantially opposes the first pressing surface (302). The first pressing surface (302) comprises at least one tool relief region (306, 312, 314, 316, 318), whereby to form at least one corresponding respective panel relief region (206, 212, 214, 216, 218) in a surface of the resonant panel (200).

An electrodynamic transducer having a coil, a membrane, and a plate is disclosed, wherein the transducer is adapted to generate a sound pressure level in the human-audible acoustic range and the ultrasonic range so that the transducer may be used as a speaker and an ultrasonic proximity sensor. The transducer may be adapted to generate a sound pressure level above about 88 dB between 20 kHz and 70 kHz. The plate may include a structural rigidity increasing feature such as a domed portion or a population of ribs, which may increase the generated sound pressure level in the ultrasonic range. The transducer may also include a front resonator which may be used to further tune and/or increase the generated sound pressure level in the ultrasonic range.

The application describes MEMS transducer structures comprising a membrane structure having a flexible membrane layer and at least one electrode layer. The electrode layer is spaced from the flexible membrane layer such that at least one air volume extends between the material of the electrode layer and the membrane layer. The electrode layer is supported relative to the flexible membrane by means of a support structure which extends between the first electrode layer and the flexible membrane layer.

A sound producing cell includes a membrane and an actuating layer. The membrane includes a first membrane subpart and a second membrane subpart, wherein the first membrane subpart and the second membrane subpart are opposite to each other. The actuating layer is disposed on the first membrane subpart and the second membrane subpart. The first membrane subpart includes a first anchored edge which is fully or partially anchored, and edges of the first membrane subpart other than the first anchored edge are non-anchored. The second membrane subpart includes a second anchored edge which is fully or partially anchored, and edges of the second membrane subpart other than the second anchored edge are non-anchored.

A microfabricated structure includes a perforated stator; a first isolation layer on a first surface of the perforated stator; a second isolation layer on a second surface of the perforated stator; a first membrane on the first isolation layer; a second membrane on the second isolation layer; and a pillar coupled between the first membrane and the second membrane, wherein the first isolation layer includes a first tapered edge portion having a common surface with the first membrane, wherein the second isolation layer includes a first tapered edge portion having a common surface with the second membrane, and wherein an endpoint of the first tapered edge portion of the first isolation layer is laterally offset with respect to an endpoint of the first tapered edge portion of the second isolation layer.

Provided is a laminated piezoelectric element capable of suppressing a short circuit between piezoelectric films in a laminated piezoelectric element in which a plurality of layers of a piezoelectric film formed by interposing a piezoelectric layer between an electrode layer and a protective layer are laminated. The laminated piezoelectric element is formed by laminating a plurality of layers of piezoelectric films each having a piezoelectric layer, two electrode layers between which the piezoelectric layer is interposed, and two protective layers respectively covering the electrode layers. At least a part of each end side of the adjacent piezoelectric films is located at a different position in a plane direction.

A transducer includes a first piezoelectric layer; and a second piezoelectric layer that is above the first piezoelectric layer; wherein the second piezoelectric layer is a more compressive layer with an average stress that is less than or more compressive than an average stress of the first piezoelectric layer.