PACKAGE STRUCTURE AND COMMUNICATIONS DEVICE
20200294892 ยท 2020-09-17
Inventors
Cpc classification
H01L2924/00012
ELECTRICITY
H01L2224/26122
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L2224/83951
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L23/36
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2924/15763
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/83192
ELECTRICITY
H01L2224/92247
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2224/92247
ELECTRICITY
H01L2924/16152
ELECTRICITY
H01L2924/15763
ELECTRICITY
H01L23/3185
ELECTRICITY
H01L2224/48137
ELECTRICITY
H01L2224/32257
ELECTRICITY
H01L24/73
ELECTRICITY
International classification
Abstract
A package structure is disclosed, the package structure includes a substrate, a chip, a bonding layer, and a coating. A plurality of grooves are disposed on the substrate. Silver bonding materials are disposed in the grooves and on a surface of the substrate, to form the bonding layer. The chip is connected to the substrate by using the bonding layer. The grooves are symmetrically arranged along a first and a second axis that are perpendicular to each other, a vertical projection of the chip on the substrate is centrosymmetric about the first and the second axis, and the vertical projection of the chip on the substrate covers a partial area of an outer-ring groove which faces a periphery of the chip. The coating covers a surface that is of the bonding layer and not in contact with the substrate or the chip, used to prevent migration of silver ions.
Claims
1. A package structure, comprising a substrate, a chip, a bonding layer, and a coating, wherein a plurality of grooves are disposed on the substrate; silver bonding materials are disposed in the plurality of grooves and on a surface of the substrate, to form the bonding layer; the chip is connected to the substrate by using the bonding layer; the plurality of grooves are symmetrically arranged along a first axis of symmetry and a second axis of symmetry that are perpendicular to each other, a vertical projection of the chip on the substrate is centrosymmetric about the first axis of symmetry and the second axis of symmetry, a groove in the plurality of grooves that faces a periphery of the chip is an outer-ring groove, and the vertical projection of the chip on the substrate covers a partial area of the outer-ring groove; and the coating covers a surface that is of the bonding layer and that is not in contact with the substrate or the chip, and is used to prevent migration of silver ions in the bonding layer.
2. The package structure according to claim 1, wherein the bonding layer is even in thickness, and being even in thickness means that the silver bonding materials that are symmetrically distributed along the first axis of symmetry and the second axis of symmetry are the same in thickness.
3. The package structure according to claim 2, wherein that the bonding layer is even in thickness comprises: a bonding material that is of the bonding layer and that is located in a vertical projection area of the chip is even in thickness; and a bonding material that is of the bonding layer and that is on a side of the chip is even in climbing height.
4. The package structure according to claim 1, wherein a dimension of the bonding layer in a direction perpendicular to the substrate is at least 25 m.
5. The package structure according to claim 1, wherein the chip comprises a top surface, a bottom surface, and a side surface connecting the top surface to the bottom surface, the side surface comprises a step surface, the coating covers the step surface, and the step surface is used to increase a coverage area of the coating and prolong a migration path of the silver ions in the bonding layer.
6. The package structure according to claim 5, wherein a size of the top surface is less than a size of the bottom surface, the step surface faces the top surface, and a vertical distance between the top surface and the bottom surface is greater than 1 m.
7. The package structure according to claim 5, wherein a size of the top surface is greater than a size of the bottom surface, the step surface faces the substrate, and a vertical distance between the top surface and the bottom surface is greater than 1 m.
8. The package structure according to claim 1, further comprising a pin configured to connect to an external circuit, wherein the chip is electrically connected to the pin by using a bonding wire, the pin comprises a gate electrode and a drain electrode, and the gate electrode and the drain electrode are respectively located on two opposite sides of the package structure.
9. The package structure according to claim 8, wherein an auxiliary coating is further disposed on the surface of the substrate, the auxiliary coating is disposed on an extension path between the bonding layer and the pin, and the coating is located between the auxiliary coating and the bonding layer.
10. The package structure according to claim 1, wherein there are a plurality of outer-ring grooves, the vertical projection of the chip on the substrate is a quadrilateral, and each side of the quadrilateral corresponds to at least three outer-ring grooves.
11. The package structure according to claim 10, wherein sizes of grooves corresponding to four angles of the quadrilateral each are greater than a size of another groove in the outer-ring grooves.
12. The package structure according to claim 1, wherein there are four outer-ring grooves, the vertical projection of the chip on the substrate is a quadrilateral, and the outer-ring grooves respectively correspond to four angles of the quadrilateral.
13. The package structure according to claim 1, wherein the groove corresponding to a central area of the chip is a central groove, the outer-ring groove is an annular groove, and the annular groove surrounds the central groove.
14. The package structure according to claim 1, wherein a depth of each groove is at least 5 m, and the depth of the groove is an extension dimension of the groove in a direction perpendicular to an installation surface.
15. The package structure according to claim 14, wherein a distance between adjacent grooves is 100 m to 200 m.
16. The package structure according to claim 1, wherein the package structure is a power amplifier.
17. A communications device, comprising a package structure, a radio frequency small signal component, and a radio frequency passive component, wherein the package structure is a power amplifier, and is connected between the radio frequency small signal component and the radio frequency passive component; wherein the package structure comprises a substrate, a chip, a bonding layer, and a coating, wherein a plurality of grooves are disposed on the substrate; silver bonding materials are disposed in the plurality of grooves and on a surface of the substrate, to form the bonding layer; the chip is connected to the substrate by using the bonding layer; the plurality of grooves are symmetrically arranged along a first axis of symmetry and a second axis of symmetry that are perpendicular to each other, a vertical projection of the chip on the substrate is centrosymmetric about the first axis of symmetry and the second axis of symmetry, a groove in the plurality of grooves that faces a periphery of the chip is an outer-ring groove, and the vertical projection of the chip on the substrate covers a partial area of the outer-ring groove; and the coating covers a surface that is of the bonding layer and that is not in contact with the substrate or the chip, and is used to prevent migration of silver ions in the bonding layer.
18. The communications device according to claim 17, wherein, the bonding layer is even in thickness, and being even in thickness means that the silver bonding materials that are symmetrically distributed along the first axis of symmetry and the second axis of symmetry are the same in thickness.
19. The communications device according to claim 18, wherein that the bonding layer is even in thickness comprises: a bonding material that is of the bonding layer and that is located in a vertical projection area of the chip is even in thickness; and a bonding material that is of the bonding layer and that is on a side of the chip is even in climbing height.
20. The communications device according to claim 17, wherein a dimension of the bonding layer in a direction perpendicular to the substrate is at least 25 m.
21. The communications device according to claim 17, wherein the chip comprises a top surface, a bottom surface, and a side surface connecting the top surface to the bottom surface, the side surface comprises a step surface, the coating covers the step surface, and the step surface is used to increase a coverage area of the coating and prolong a migration path of the silver ions in the bonding layer.
22. The communications device according to claim 17, further comprising a pin configured to connect to an external circuit, wherein the chip is electrically connected to the pin by using a bonding wire, the pin comprises a gate electrode and a drain electrode, and the gate electrode and the drain electrode are respectively located on two opposite sides of the package structure.
23. The communications device according to claim 22, wherein an auxiliary coating is further disposed on the surface of the substrate, the auxiliary coating is disposed on an extension path between the bonding layer and the pin, and the coating is located between the auxiliary coating and the bonding layer.
24. The package structure according to claim 17, wherein there are a plurality of outer-ring grooves, the vertical projection of the chip on the substrate is a quadrilateral, and each side of the quadrilateral corresponds to at least three outer-ring grooves.
25. The package structure according to claim 24, wherein sizes of grooves corresponding to four angles of the quadrilateral each are greater than a size of another groove in the outer-ring grooves.
26. The package structure according to claim 17, wherein there are four outer-ring grooves, the vertical projection of the chip on the substrate is a quadrilateral, and the outer-ring grooves respectively correspond to four angles of the quadrilateral.
27. The package structure according to claim 17, wherein the groove corresponding to a central area of the chip is a central groove, the outer-ring groove is an annular groove, and the annular groove surrounds the central groove.
Description
BRIEF DESCRIPTION OF DRAWINGS
[0065] To describe the technical solutions in the embodiments of the present invention or in the background more clearly, the following describes the accompanying drawings required for describing the embodiments of the present invention or the background.
[0066]
[0067]
[0068]
[0069]
[0070]
[0071]
[0072]
[0073]
[0074]
[0075]
[0076]
[0077]
DESCRIPTION OF EMBODIMENTS
[0078] The following describes the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention.
[0079] As shown in
[0080] In the baseband circuit, a baseband (Baseband) is responsible for demodulating, descrambling, despreading, and decoding a radio signal in a mobile network, and transmitting a finally decoded digital signal to an upper-layer processing system for processing. The baseband is usually referred to as a BB, and the baseband may be understood as a communications module.
[0081] A flowing direction of a signal from the baseband to an antenna is specifically as follows: A digital-to-analog converter converts a signal (digital signal) in the baseband into an analog signal; a frequency mixer increases signal frequency of the analog signal; then an amplifier drives signal power to be amplified; and an acoustic surface-wave filter filters out an out-of-band signal from a signal that is output by the amplifier, to filter out most signals that do not belong to this broadband. A signal obtained after the filtering is transferred to the power component to drive the signal. Then, the signal is input into an isolator, and the isolator isolates an unnecessary signal, to improve signal linearity. Finally, a filter filters the signal for a last time, to ensure signal purity, and then sends, by using the antenna, a signal obtained after the filtering.
[0082] A flowing direction of a signal from the antenna to the baseband is specifically as follows: A signal received by the antenna is transmitted to a duplexer; then the signal is transmitted to a low noise amplifier by using a coupler; and after being sequentially transmitted to an acoustic surface-wave filter, a frequency mixer, an intermediate frequency filter, an intermediate frequency amplifier, and an anti-aliasing filter, a signal processed by the low noise amplifier is converted into a digital signal by an analog-to-digital converter, and then the digital signal is transmitted to the baseband.
[0083] This embodiment of the present invention relates to a package structure and a communications device that has the package structure. The communications device is a remote radio unit (RRU, Radio Remote Unit) in a base station. The package structure is a power amplifier. A power component that performs a function of radio frequency signal amplification and that is located between the radio frequency small signal component and the radio frequency passive component on the power amplifier board of the base station shown in
[0084] Referring to
[0085] In this application, the plurality of grooves 12 are used to reduce and disperse stress of the bonding layer 30. To better reduce and disperse stress, the grooves may be arranged by using methods described in the following embodiments.
[0086] In an embodiment, the plurality of grooves 12 are symmetrically arranged along a first axis of symmetry and a second axis of symmetry that are perpendicular to each other, in other words, the plurality of grooves are symmetrically arranged with respect to both the first axis of symmetry and the second axis of symmetry. Two axes of symmetry that are perpendicular to each other, namely, a third axis of symmetry and a fourth axis of symmetry, of a shape of a vertical projection of the chip 20 that is formed on the installation surface after the chip 20 (in a rectangular shape) is installed on the installation surface respectively overlap the first axis of symmetry and the second axis of symmetry. In other words, the vertical projection of the chip 20 on the substrate 10 is centrosymmetric about the first axis of symmetry and the second axis of symmetry.
[0087] For example, referring to
[0088]
[0089] With reference to
[0090] Referring to
[0091] Specifically, an area that is on the surface of the substrate 10 and on which the grooves 12 are disposed is an area A. The area A includes a central area C (that is, an area surrounded by dash-dot-dot lines in the figure) and a peripheral area B surrounding the central area C. The central area C is opposite to a central area of the chip 20, the peripheral area B is opposite to a periphery of the chip 20, the plurality of grooves 12 are arranged in the central area C and the peripheral area B, and a part of the groove 12 located in the peripheral area B is outside the vertical projection of the chip 20 on the installation surface (in other words, with reference to
[0092] Referring to
[0093] Referring to
[0094] Referring to
[0095] Referring to
[0096] In an implementation, a depth of each groove 12 is at least 5 m and does not exceed a thickness of the substrate 10, and the depth of the groove 12 is an extension dimension of the groove 12 in a direction perpendicular to the installation surface.
[0097] In an implementation, a distance between adjacent grooves 12 is 100 m to 200 m.
[0098] Specifically, a shape of a single groove 12 may be a circle, a square, an ellipse, or another irregular shape; an area of the single groove 12 is 0.03 mm.sup.2 to 0.07 mm.sup.2; the distance between adjacent grooves 12 is 100 m to 200 m; and the depth of each groove 12 is at least 5 m. In an implementation, surface roughness Ra of an inner wall of each groove 12 is 0.1 to 0.2 m.
[0099] In the present invention, the groove 12 is disposed on the substrate 10, to increase a contact area between the bonding layer 30 and the substrate 10, and increase a thickness of the bonding layer 30, so that the bonding layer 30 can release stress caused by thermal expansion, thereby avoiding stratification or cracking of the bonding layer 30.
[0100] In an implementation, the bonding layer 30 is even in thickness. A thickness of the bonding layer 30 includes two parts. One part is a thickness of the bonding layer 30 located between the substrate 10 and the chip 20 (namely, a dimension of the bonding layer 30 between the substrate 10 and the chip 20 in a direction perpendicular to the surface of the substrate 10). The other part is a climbing height of a bonding material that is of the bonding layer 30 and that is on a side of the chip 20. Being even in thickness means that bonding materials symmetrically distributed along two axes of symmetry that are perpendicular to each other (namely, the first axis of symmetry and the second axis of symmetry) are the same in thickness. In other words, a bonding material at a location needs to have a same thickness as not only a bonding material at a symmetric location of the location with respect to the first axis of symmetry but also a bonding material at a symmetric location of the location with respect to the second axis of symmetry. It should be noted that, due to a limitation of techniques, evenness herein cannot be absolute 100% evenness. A person skilled in the art may understand that evenness herein is evenness that can be implemented by using specific techniques, and an error is acceptable. To implement an even thickness, depths of grooves may be set to be the same, to avoid a case in which the bonding layer 30 is uneven in thickness because the grooves have different depths.
[0101] The bonding layer is even in thickness, so that stress can be better evenly dispersed, thereby better reducing stratification or cracking of the bonding layer.
[0102] In an implementation, the bonding layer 30 is made from silver (namely, nanoscale pure silver particles, where pure silver is silver that can be made as pure as possible by using existing techniques or silver that is made as pure as possible to approach purity in the prior art, and usually silver content is at least 99%), and a heat conduction path between the chip 20 and the substrate 10 is implemented through sintering and curing. In this embodiment, the bonding layer 30 is limited to a silver bonding material. The silver bonding material is sintered and cured between the chip 20 and the substrate 10 to conduct heat. Because the silver (namely, the pure silver) is used, thermal resistance is very low, and heat conductivity may exceed or approach 400 W/m.Math.K. The silver bonding material has a better heat dissipation effect than another material (for example, another metal alloy or a silver alloy). In other embodiments, some other silver alloys with relatively low silver content, or other metals, or other materials with low thermal resistance are not limited.
[0103] Because of special material characteristics (a large coefficient of thermal expansion and low material density) of the silver bonding material, stratification of a silver layer and migration of silver ions may occur after cyclic humidity-heat-temperature tests. Stratification of the silver layer can be resolved in the various manners described above (for example, disposing the plurality of grooves, and being even in thickness). In addition, in another implementation, the thickness (namely, a dimension in a direction perpendicular to the substrate 10) of the silver bonding layer 30 between the substrate and the chip may alternatively be set to be within a range from 5 m to 50 m. In an embodiment, a range from 25 m to 50 m is used, so that mechanical stress caused by thermal expansion can be better released, thereby better resolving a reliability problem such as stratification or cracking of the bonding layer. A largest climbing height of the silver is less than 30% of a height of the chip (die) 20, and the height of the chip 20 is a dimension of the chip 20 in the direction perpendicular to the substrate 10.
[0104] To prevent migration of the silver ions, in an implementation, the package structure further includes a coating 40. The coating 40 covers a surface that is of the bonding layer 30 and that is not in contact with the substrate 10 or the chip 20, and is used to prevent migration of silver ions in the bonding layer 30 that is caused because vapor enters the bonding layer 30. Specifically, the coating 40 covers an entire surface of an exposed part of the bonding layer 30. A thickness of the coating 40 covered on the surface of the bonding layer 30 is at least 5 m. In this implementation, the coating 40 is a material with high Tg (150 C.), and has a high-waterproofing characteristic. In an implementation, the coating 40 is a cyclo olefin polymer.
[0105] In another implementation, the coating 40 may be a chemical coating. A material of the chemical coating needs to have high Tg (higher than junction temperature Tj of the chip 20) and a high-waterproofing characteristic, and a thickness of the chemical coating is within a range from 10 m to 30 m. In an implementation, the coating 40 is metal plating, a material of the metal plating may be Ni, Sn, or stainless steel, and a thickness of the metal plating is within a range from 5 m to 10 m.
[0106] Referring to
[0107] The step surface 232 is formed by using a technique of performing cutting twice in a process of cutting the chip 20. A thick cutter is used during first cutting, a thin cutter is used during second cutting, and a thickness difference between the thick cutter and the thin cutter may be at least 2 m.
[0108] In an implementation, as shown in
[0109] In an implementation, as shown in
[0110] Referring to
[0111] In an implementation, the pin 50 includes a gate electrode 52 and a drain electrode 54, and the gate electrode 52 and the drain electrode 54 are respectively located on two opposite sides of the package structure.
[0112] An insulation layer 70 is disposed between the pin 50 and the substrate 10, and the insulation layer 70 may be a ceramic material. The insulation layer 70 raises the pin 50, so that a height of the pin relative to the substrate 10 is close to a height of the top surface of the chip 20 relative to the substrate 10. Specifically, the height of the pin relative to the substrate 10 is the same as the height of the top surface of the chip 20 relative to the substrate 10, or the height of the pin relative to the substrate 10 is greater than the height of the top surface of the chip 20 relative to the substrate 10.
[0113] In an implementation, referring to
[0114] The cover 80 may be a ceramic cover 80, and the substrate 10 may be a metal substrate.
[0115] Referring to
[0116] Referring to
[0117] The package structure provided in the embodiments of the present invention is used for same power amplifiers, and a bonding layer 30 with heat conductivity greater than 200 W/m.Math.K and a bonding material currently used in the industry are used, to measure thermal resistance data of the components. As shown in
[0118] The package structure provided in the embodiments of the present invention can pass a high-temperature and high-humidity stress test, to determine whether the silver ions migrate. A process of confirming an effect of migration of the silver ions is as follows: Because the bonding layer 30 is covered by the coating 40, the bonding layer 30 can pass a HAST (highly accelerated stress test, Highly Accelerated Stress Test) and the high-temperature and high-humidity stress test. Details are as follows: [0119] (1) A quantity of samples: 20 pcs [0120] (2) Test conditions: 135 C. (temperature)+85% (humidity)+33.3 Psi (atmospheric pressure)+96 hours [0121] (3) Test judgment criterion: Using an instrument to observe whether silver ions migrate. [0122] (4) Result: A device without protection from the coating 40 cannot pass a reliability test, namely, the HAST; and a device with protection from the coating 40 can pass HAST tests a plurality of times.
[0123] The embodiments of the present invention can also pass an application emulation test.
(1) Stress Emulation Tests of Bonding Layers 30 (Silver Bonding Materials) With Different Thicknesses
[0124] Two different materials are sintered with Ag, to perform stress emulation in different thicknesses (BLT). It can be learned from analysis of a stress emulation result that, when the thickness (BLT) of the bonding layer (Ag layer) reaches at least 30 m, shear stress between the bonding layer (Ag layer) and a metal flange is much lower (50% to 80%) than stress generated when the thickness of the bonding layer is 10 m or 20 m. When the thickness of the bonding layer (Ag layer) is 10 m, stress is 6 MPa to 7 MPa. When the thickness of the bonding layer (Ag layer) is 20 m, stress is 3.8 MPa to 4.2 MPa. When the thickness of the bonding layer (Ag layer) is 30 m, stress is only 1.8 MPa to 2.6 MPa. Therefore, increase of the thickness of the bonding layer (Ag layer) can reduce the shear stress between the bonding layer and the metal flange, thereby resolving a reliability problem such as stratification or cracking of the silver layer.
[0125] Maximum stress of the chip 20 is directly proportional to a thermal expansion difference, an ambient temperature difference, an elastic modulus of the silver bonding material, an elastic modulus of the substrate 10 (the metal flange), and a dimension of a long side of the chip 20, and is inversely proportional to the thickness of the bonding layer 30 (sintered silver).
[0126] It can be learned from comprehensive analysis of a stress emulation result and model that, in the embodiments of the present invention, the thickness of the bonding layer 30 needs to be at least 25 m.
(2) A Stress Emulation Test of the Substrate 10 on Which the Groove 12 is Disposed
[0127] Stress emulation of the substrate 10 on which the groove 12 is designed is compared with stress emulation of the substrate 10 on which no groove 12 is designed. A maximum value of central stress of the substrate 10 on which the groove 12 is designed is 150 MPa, and a maximum stress value of the substrate 10 on which no groove 12 is designed is greater than 400 MPa. It can be learned through comparison that stress of a package structure in which the groove 12 is designed is reduced by at least 60%; and design of the groove 12 is conducive to even stress distribution of the entire chip 20, and there is no local stress peak, thereby helping resolve a reliability problem such as stratification or cracking of the silver bonding material.
[0128] A package structure manufacture method provided in the present invention includes the following steps:
[0129] As shown in
[0130] As shown in
[0131] As shown in
[0132] As shown in
[0133] The foregoing descriptions are merely specific implementations of the present invention, but are not intended to limit the protection scope of the present invention. Any variation or replacement readily figured out by a person skilled in the art within the technical scope disclosed in the present invention shall fall within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.