Scalable semiconductor interposer integration

Abstract

An electronic package comprising a first substrate; a second substrate; at least one standoff substrate positioned between the first substrate and the second substrate, wherein the at least one standoff substrate is affixed to each of the first substrate and the second substrate, wherein the at least one standoff substrate forms a clearance between the first substrate and the second substrate, and wherein the at least one standoff substrate comprises an intervening plurality of through-substrate vias passing through the entire thickness of the at least one standoff substrate, and wherein a portion of the second plurality of through-substrate vias are electrically connected to a portion of the first through-substrate vias by way of a portion of the intervening through-substrate vias; and at least three electronic components located within the clearance.

Claims

1. A method of forming an electronic package, the method comprising: forming a first substrate, wherein the first substrate comprises a first plurality of through-substrate vias perpendicular to a first plane of the first substrate and passing through the entire thickness of the first substrate; forming a second substrate having a second plane parallel to the first plane, wherein the second substrate comprises a second plurality of through-substrate vias perpendicular to the second plane of the second substrate and passing through the entire thickness of the second substrate; positioning at least one standoff substrate between the first substrate and the second substrate, wherein the at least one standoff substrate is affixed to each of the first substrate and the second substrate, wherein the at least one standoff substrate forms a clearance between the first substrate and the second substrate, and wherein the at least one standoff substrate comprises an intervening plurality of through-substrate vias passing through the entire thickness of the at least one standoff substrate, and wherein a portion of the second plurality of through-substrate vias are electrically connected to a portion of the first plurality of through-substrate vias by way of a portion of the intervening plurality of through-substrate vias; placing a plurality of electronic components within the clearance; and electrically coupling the plurality of electronic components to the first substrate by a first plurality of electrical connections, wherein the plurality of electronic components including a first electronic component and a second electronic component, and the first electronic component is stacked on top of the second electronic component or the second electronic component is stacked on the first electronic component forming a stacked component.

2. The method of forming an electronic package according to claim 1, wherein one of the plurality of the electronic components is an antenna or amplifier or capacitor or resistor or inductor or processor or memory or sensor or analog-to-digital converter or electrical-optical converter or optical-electrical converter or Light Emitting Diode (LED) or ASIC or laser or FPGA or analog circuit or digital circuit or SerDes or filter or Lens or GPU or waveguide or fiber or accelerator or MEMS or heat spreader or RDL or an energy source such as battery.

3. The method of forming an electronic package according to claim 1, wherein all of said plurality of electronic components are the same type of component.

4. The method of forming an electronic package according to claim 1, wherein at least two of said plurality of electronic components are the same type of component.

5. The method of forming an electronic package according to claim 1, wherein the plurality of electronic components including the first electronic component, the second electronic component and a third electronic component, and at least one of the first electronic component, the second electronic component or the third electronic component is stacked on the top of each other, forming a stacked component.

6. The method of forming an electronic package according to claim 5, wherein the first electronic component having a height surface area different from a height surface area of the second electronic component, said height surface area of the first electronic component is different from a height surface area of the third electronic component, and said height surface area of the second electronic component is different from the height surface area of the third electronic component.

7. The method of forming an electronic package according to claim 5, wherein the first electronic component, the second electronic component and the third electronic component communicate through Redistribution Layer (RDL).

8. The method of forming an electronic package according to claim 1, wherein the first substrate and/or second substrate contains one or more cavities and/or through holes.

9. The method of forming an electronic package according to claim 1, wherein at least one of said plurality of electronic components is electrically coupled to at least one standoff substrate.

10. The method of forming an electronic package according to claim 1, wherein at least one standoff substrate and at least one substrate is manufactured as one piece.

11. The method of forming an electronic package according to claim 1, wherein at least one substrate and at least one electronic component is manufactured as one piece.

12. The method of forming an electronic package according to claim 1, wherein at least one substrate comprises of RDL.

13. The method of forming an electronic package according to claim 11, wherein at least one substrate comprises of RDL.

14. An electronic package comprising: a first substrate, wherein the first substrate comprises a first plurality of through-substrate vias perpendicular to a first plane of the first substrate and passing through the entire thickness of the first substrate; a second substrate having a second plane parallel to the first plane, wherein the second substrate comprises a second plurality of through-substrate vias perpendicular to the second plane of the second substrate and passing through the entire thickness of the second substrate; at least one standoff substrate positioned between the first substrate and the second substrate, wherein the at least one standoff substrate is affixed to each of the first substrate and the second substrate, wherein the at least one standoff substrate forms a clearance between the first substrate and the second substrate, and wherein the at least one standoff substrate comprises an intervening plurality of through-substrate vias passing through the entire thickness of the at least one standoff substrate, and wherein a portion of the second plurality of through-substrate vias are electrically connected to a portion of the first plurality of through-substrate vias by way of a portion of the intervening plurality of through-substrate vias; and a plurality of electronic components located within the clearance, wherein the plurality of electronic components is electrically coupled to the first substrate by a first plurality of electrical connections, the plurality of electronic components including a first electronic component and a second electronic component, the first electronic component and the second electronic component each being one of either a processor, a memory or a sensor, and the first electronic component is a different electronic component as compared to the second electronic component.

15. The electronic package according to claim 14, wherein one of the plurality of the electronic components is an antenna or amplifier or FPGA or capacitor or resistor or inductor or processor or memory or sensor or analog-to-digital converter or electrical-optical converter or optical-electrical converter or Light Emitting Diode (LED) or ASIC or laser or analog circuit or digital circuit or SerDes or filter or Lens or GPU or waveguide or fiber or accelerator or MEMS or heat spreader or RDL or an energy source such as battery.

16. The electronic package according to claim 15, wherein at least one of said plurality of electronic components is electrically coupled to the first substrate and/or second substrate.

17. The electronic package according to claim 14, wherein the first substrate and/or second substrate contains one or more cavities and/or through holes.

18. The electronic package according to claim 14, wherein the plurality of electronic components including the first electronic component, the second electronic component and a third electronic component, the first electronic component, the second electronic component and the third electronic component is one of either the processor, the memory or the sensor, and the third electronic component is a different electronic component as compared to the first electronic component and the second electronic component.

19. The electronic package according to claim 18, wherein the first electronic component having a height surface area different from a height surface area of the second electronic component, said height surface area of the first electronic component is different from a height surface area of the third electronic component, and said height surface area of the second electronic component is different from the height surface area of the third electronic component.

20. The electronic package according to claim 18, wherein the first electronic component, the second electronic component and the third electronic component communicate through Redistribution Layer (RDL).

21. The electronic package according to claim 14, wherein at least two of said plurality of electronic components are the same type of component.

22. The electronic package according to claim 14, wherein at least one of said plurality of electronic components is electrically coupled to at least one standoff substrate.

23. The electronic package according to claim 14, wherein at least one standoff substrate and at least one substrate is manufactured as one piece.

24. The electronic package according to claim 14, wherein at least one substrate and at least one electronic component is manufactured as one piece.

25. The electronic package according to claim 14, wherein at least one substrate comprises of RDL.

26. The electronic package according to claim 24, wherein at least one substrate comprises of RDL.

27. A method of forming an electronic package, the method comprising: forming a first substrate, wherein the first substrate comprises a first plurality of through-substrate vias perpendicular to a first plane of the first substrate and passing through the entire thickness of the first substrate; forming a second substrate having a second plane parallel to the first plane, wherein the second substrate comprises a second plurality of through-substrate vias perpendicular to the second plane of the second substrate and passing through the entire thickness of the second substrate; positioning at least one standoff substrate between the first substrate and the second substrate, wherein the at least one standoff substrate is affixed to each of the first substrate and the second substrate, wherein the at least one standoff substrate forms a clearance between the first substrate and the second substrate, and wherein the at least one standoff substrate comprises an intervening plurality of through-substrate vias passing through the entire thickness of the at least one standoff substrate, and wherein a portion of the second plurality of through-substrate vias are electrically connected to a portion of the first plurality of through-substrate vias by way of a portion of the intervening plurality of through-substrate vias; placing a plurality of electronic components within the clearance; and coupling the plurality of electronic components to the first substrate, wherein the plurality of electronic components including a first electronic component and a second electronic component, the plurality of electronic components including the first electronic component, the second electronic component, and a third electronic component, and at least one of the first electronic component, the second electronic component or the third electronic component is stacked on the top of each other.

28. The method of forming an electronic package according to claim 27, wherein all of said plurality of electronic components are the same type of component.

29. The method of forming an electronic package according to claim 27, wherein at least two of said plurality of electronic components are the same type of component.

30. An electronic package comprising: a first substrate, wherein the first substrate comprises a first plurality of through-substrate vias perpendicular to a first plane of the first substrate and passing through the entire thickness of the first substrate; a second substrate having a second plane parallel to the first plane, wherein the second substrate comprises a second plurality of through-substrate vias perpendicular to the second plane of the second substrate and passing through the entire thickness of the second substrate; at least one standoff substrate positioned between the first substrate and the second substrate, wherein the at least one standoff substrate is affixed to each of the first substrate and the second substrate, wherein the at least one standoff substrate forms a clearance between the first substrate and the second substrate, and wherein the at least one standoff substrate comprises an intervening plurality of through-substrate vias passing through the entire thickness of the at least one standoff substrate, and wherein a portion of the second plurality of through-substrate vias are electrically connected to a portion of the first plurality of through-substrate vias by way of a portion of the intervening plurality of through-substrate vias; a plurality of electronic components located within the clearance; and the plurality of electronic components is coupled to the first substrate, wherein the plurality of electronic components including a first electronic component and a second electronic component, the plurality of electronic components including the first electronic component, the second electronic component, and a third electronic component, and at least one of the first electronic component, the second electronic component or the third electronic component is stacked on the top of each other.

31. The electronic package according to claim 30, all of said plurality of electronic components are the same type of component.

32. The electronic package according to claim 30, wherein at least two of said plurality of electronic components are the same type of component.

33. The electronic package according to claim 30, wherein one of the plurality of the electronic components is an antenna or amplifier or FPGA or capacitor or resistor or inductor or processor or memory or sensor or analog-to-digital converter or digital-to-analog converter or electrical-optical converter or optical-electrical converter or Light Emitting Diode (LED) or ASIC or TSV or laser or analog circuit or digital circuit or SerDes or filter or Lens or GPU or magnet or waveguide or wirebond or mold or under-fill or heat-pipe or mirror or fan or bump or fiber or accelerator or MEMS or membrane or heat spreader or RDL or energy source or light source or battery.

34. The electronic package according to claim 30, wherein the first substrate and/or second substrate contains one or more cavities and/or through holes.

35. The electronic package according to claim 30, wherein at least one of said plurality of electronic components is coupled to at least one standoff substrate.

36. The electronic package according to claim 30, wherein at least one substrate and at least one electronic component is manufactured as one piece.

37. The electronic package according to claim 30, wherein at least one substrate comprises of RDL.

38. The electronic package according to claim 36, wherein at least one substrate comprises of RDL.

39. The electronic package according to claim 30, wherein at least one of the plurality of electronic component is coupled to the first substrate and/or second substrate and/or standoff substrate.

40. A method of forming an electronic package, the method comprising: forming a first substrate, wherein the first substrate comprises a first plurality of substrate vias; forming a second substrate, wherein the second substrate comprises a second plurality of substrate vias; positioning at least one standoff substrate between the first substrate and the second substrate, wherein the at least one standoff substrate is affixed to each of the first substrate and the second substrate, wherein the at least one standoff substrate forms a clearance between the first substrate and the second substrate, and wherein the at least one standoff substrate comprises an intervening plurality of substrate vias passing through the entire thickness of the at least one standoff substrate, and wherein a portion of the second plurality of substrate vias are coupled to a portion of the first plurality of substrate vias by way of a portion of the intervening plurality of substrate vias; placing a plurality of electronic components within the clearance; and coupling the plurality of electronic components to the first substrate, wherein the plurality of electronic components including a first electronic component and a second electronic component, and the first electronic component is stacked on top of the second electronic component or the second electronic component is stacked on the first electronic component forming a stacked component.

41. The method of forming an electronic package according to claim 40, wherein one of the plurality of the electronic components is an antenna or amplifier or capacitor or resistor or inductor or processor or memory or sensor or analog-to-digital converter or digital-to-analog converter or electrical-optical converter or optical-electrical converter or Light Emitting Diode (LED) or ASIC or TSV or laser or FPGA or analog circuit or digital circuit or SerDes or filter or Lens or GPU or magnet or waveguide or wirebond or mold or under-full or heat-pipe or mirror or fan or bump or fiber or accelerator or MEMS or membrane or heat spreader or RDL or energy source or light source or battery.

42. The method of forming an electronic package according to claim 40, wherein all of said plurality of electronic components are the same type of component.

43. The method of forming an electronic package according to claim 40, wherein at least two of said plurality of electronic components are the same type of component.

44. The method of forming an electronic package according to claim 40, wherein the first substrate and/or second substrate contains one or more cavities and/or through holes.

45. The method of forming an electronic package according to claim 40, wherein at least one of said plurality of electronic components is coupled to at least one standoff substrate.

46. The method of forming an electronic package according to claim 40, wherein at least one substrate and at least one electronic component is manufactured as one piece.

47. The method of forming an electronic package according to claim 40, wherein at least one substrate comprises of RDL.

48. The method of forming an electronic package according to claim 46, wherein at least one substrate comprises of RDL.

49. The method of forming an electronic package according to claim 40, wherein at least one of the plurality of electronic component is coupled to the first substrate and/or second substrate and/or standoff substrate.

50. An electronic package comprising: a first substrate, wherein the first substrate comprises a first plurality of substrate vias; a second substrate wherein the second substrate comprises a second plurality of substrate vias; at least one standoff substrate positioned between the first substrate and the second substrate, wherein the at least one standoff substrate is affixed to each of the first substrate and the second substrate, wherein the at least one standoff substrate forms a clearance between the first substrate and the second substrate, and wherein the at least one standoff substrate comprises an intervening plurality of substrate vias passing through the entire thickness of the at least one standoff substrate, and wherein a portion of the second plurality of substrate vias are coupled to a portion of the first plurality of substrate vias by way of a portion of the intervening plurality of substrate vias; and a plurality of electronic components located within the clearance, wherein the plurality of electronic components is coupled to the first substrate, the plurality of electronic components including a first electronic component and a second electronic component, the first electronic component and the second electronic component each being one of either a processor, a memory or a sensor, and the first electronic component is a different electronic component as compared to the second electronic component.

51. The electronic package according to claim 50, wherein one of the plurality of the electronic components is an antenna or amplifier or FPGA or capacitor or resistor or inductor or processor or memory or sensor or analog-to-digital converter or digital-to-analog converter or electrical-optical converter or optical-electrical converter or Light Emitting Diode (LED) or ASIC or TSV or laser or analog circuit or digital circuit or SerDes or filter or Lens or GPU or magnet or waveguide or wirebond or mold or under-full or heat-pipe or mirror or fan or bump or fiber or accelerator or MEMS or membrane or heat spreader or RDL or energy source or light source or battery.

52. The electronic package according to claim 51, wherein one of the plurality of electronic component is coupled to the first substrate and/or second substrate and/or standoff substrate and/or other electronic components.

53. The electronic package according to claim 50, wherein all of said plurality of electronic components are the same type of component.

54. The electronic package according to claim 50, wherein at least two of said plurality of electronic components are the same type of component.

55. The electronic package according to claim 50, wherein the first substrate and/or second substrate contains one or more cavities and/or through holes.

56. The electronic package according to claim 50, wherein at least one of said plurality of electronic components is coupled to at least one standoff substrate.

57. The electronic package according to claim 50, wherein at least one substrate and at least one electronic component is manufactured as one piece.

58. The electronic package according to claim 50, wherein at least one substrate comprises of RDL.

59. The electronic package according to claim 57, wherein at least one substrate comprises of RDL.

60. The electronic package according to claim 50, wherein at least one of the plurality of electronic component is coupled to the first substrate and/or second substrate and/or standoff substrate.

Description

DESCRIPTION OF THE DRAWINGS

(1) A further understanding of the nature and advantages of the embodiments may be realized by reference to the remaining portions of the specification and the drawings.

(2) FIG. 1A is a side-view schematic of a Multi-Chip-Module package according to the prior art.

(3) FIG. 1B is a top-view schematic of a Multi-Chip Module package according to the prior art.

(4) FIG. 2A is a side-view schematic of a Package-on-Package architecture according to the prior art.

(5) FIG. 2B is a perspective-view schematic of a Package-on-Package architecture according to the prior art.

(6) FIG. 3A is a top-view schematic of homogeneous partitioning according to the prior art.

(7) FIG. 3B is a top-view schematic of heterogeneous partitioning according to the prior art.

(8) FIGS. 4A, 4B and 4C are side-view schematics of interposers during the formation of cavities according to embodiments.

(9) FIGS. 5A and 5B are side-view schematics of portions of semiconductor packages with electronic components positioned in cavities according to embodiments.

(10) FIGS. 6A and 6B are side-view schematics of portions of semiconductor packages with electronic components positioned in a clearance created by standoff interposers according to embodiments.

(11) FIG. 6C is a perspective view of a portion of a semiconductor package with electronic components positioned in a clearance created by standoff interposers according to embodiments.

(12) FIGS. 7A and 7B are side view schematics of portions of semiconductor packages with electronic components positioned in clearance formed by a combination of standoff interposers and a cavity according to embodiments.

(13) FIG. 8A is a side view schematic of a portion of a semiconductor package with electronic components positioned in multiple stacked cavities according to embodiments.

(14) FIG. 8B is a side view schematic of a portion of a semiconductor package with electronic components positioned in cavities on both sides of a single interposer according to embodiments.

(15) FIG. 9A is a side-view schematic of a portion of a semiconductor package with electronic components positioned in clearances created by standoff interposers according to embodiments.

(16) FIG. 9B is a perspective view of a portion of a semiconductor package with electronic components positioned in clearances created by standoff interposers according to embodiments.

(17) FIG. 10A is a side-view schematic of a portion of a semiconductor package with electronic components positioned in clearances created by standoff interposers according to embodiments.

(18) FIG. 10B is a perspective view of a portion of a semiconductor package with electronic components positioned in clearances created by standoff interposers according to embodiments.

(19) FIGS. 11A and 11B are side-view schematics of portions of semiconductor packages with electronic components positioned in clearances created by standoff interposers according to embodiments.

(20) FIG. 12A is a side-view schematic of a portion of a semiconductor package with electronic components positioned in clearances created by standoff interposers according to embodiments.

(21) FIG. 12B is a perspective view of a portion of a semiconductor package with electronic components positioned in clearances created by standoff interposers according to embodiments.

(22) FIGS. 13A and 13B are top-view schematics of portions of semiconductor packages with electronic components positioned in clearances created by standoff interposers according to embodiments.

(23) FIG. 14 is a top-view schematic of a portion of a semiconductor package with electronic components positioned in clearances created by standoff interposers according to embodiments.

(24) FIG. 15 is a top-view schematic of a portion of a standoff interposer according to embodiments.

(25) FIGS. 16A, 16B, 16C and 16D are top-view schematics of portions of semiconductor packages according to embodiments.

(26) FIG. 17 is a side view schematic of a portion of a semiconductor package with keyed electronic components positioned within a clearance according to embodiments.

(27) FIGS. 18A and 18B are side-view schematics of portions of semiconductor packages with electronic components positioned in clearances created by standoff interposers according to embodiments.

(28) FIG. 19 is a perspective view of a portion of a semiconductor package according to embodiments.

(29) FIG. 20 is a perspective view of a portion of a semiconductor package according to embodiments.

(30) In the appended figures, similar components and/or features may have the same reference label. Further, various components of the same type may be distinguished by following the reference label by a dash and a second label that distinguishes among the similar components. If only the first reference label is used in the specification, the description is applicable to any one of the similar components having the same first reference label irrespective of the second reference label.

DETAILED DESCRIPTION

(31) Semiconductor packages are described which increase the density of electronic components within. The semiconductor package may incorporate interposers with cavities formed into the top and/or bottom. The cavities may then be used as locations for the electronic components. Alternatively, narrow spacer interposers may be used to space apart standard more laterally elongated interposers to form the indentations used to house the electronic components. The height of the clearance is equal to the height of the standoff interposers in embodiments. The semiconductor package designs described herein may be used to reduce footprint, reduce profile and increase electronic component and transistor density for semiconductor products. The cavities and clearances may form a conduit configured to promote fluid flow and enhance cooling of the electronic components during operation in embodiments.

(32) The semiconductor packages described herein possess cavities and/or standoff interposers to create spaces for a plurality of electronic components in a high density and high performance configuration. In embodiments, the semiconductor packages described may result in a smaller footprint, lower profile, miniaturized, higher performance, and thermally enhanced, and more secure packages. The packages may involve a combination of interposers, redistribution layers (RDL), through-substrate vias (TSV), so-called zero-ohm links, copper pillars, solder bumps, compression bonding, and bumpless packaging. In addition to these techniques, cavities may be made into the interposer and/or standoff interposers may be used to provide spaces (clearance) for a plurality of electronic components (e.g. passives, antennas, integrated circuits or chips) in embodiments. The standoff interposers may include redistribution layers on the top and/or bottom while a through-substrate via passes vertically through the standoff interposer. Standoff interposers may be formed, for example, by bonding multiple interposers together by thermocompression bonding or another low-profile connection technique. Oxide bonding techniques or laterally shifting any standoff interposer described herein enable wirebonds to be used to connect the standoff interposer to a printed circuit board, a substrate, or an underlying interposer in embodiments. Generally speaking, any interposer described herein may be shifted relative to the other interposers in the stack to allow the formation of wirebonds. The semiconductor interposer may be a silicon interposer according to embodiments.

(33) Electronic packages formed in the manner described herein possess improved reliability, lower cost, and higher performance due to a shortening of electrical distance and an increase in density of integrated circuit mounting locations. Reliability may be improved for embodiments which use the same semiconductor (e.g. silicon) for all interposers used to form the semiconductor package. The techniques presented also provide improvement in solder joint reliability and a reduction in warpage. Warping may occur during the wafer processing and thinning of the semiconductor interposer. The second opportunity for warping occurs during the packaging and assembly. The chance of warping increases for larger interposer lengths and package dimensions which is currently necessary for a variety of 2.5D/3D integration applications (e.g. networking). The vertical density of integrated circuits may be increased which allows the horizontal area to be reduced to achieve the same performance.

(34) FIGS. 4A, 4B and 4C are side-view schematics of interposers during the formation of cavities according to embodiments. An interposer 400-1 is shown in FIG. 4A prior to forming any cavities for electronic components. FIG. 4B shows an interposer 400-2 having a top cavity 410 as well as a bottom cavity 420. FIG. 4C shows an interposer 400-3 having four cavities (430, 440, 450, 460) formed into its top and bottom surfaces. The dotted lines define the extent of the cavity in the direction of the opening for the purposes of determining whether a die is within the cavity or entirely within the cavity herein.

(35) When describing all embodiments herein, Top and Up will be used herein to describe portions/directions perpendicularly distal from the printed circuit board (PCB) plane and further away from the center of mass of the PCB in the perpendicular direction. Vertical will be used to describe items aligned in the Up direction towards the Top. Other similar terms may be used whose meanings will now be clear. Major planes of objects will be defined as the plane which intersects the largest area of an object such as an interposer. Some standoff interposers may be aligned in lines along the longest of the three dimensions and may therefore be referred to as linear standoff interposers. Electrical connections may be made between interposers (standoff or planar interposer) and the pitch of the electrical connections may be between 1 m and 150 m or between 10 m and 100 m in all embodiments described herein. Electrical connections between neighboring semiconductor interposers herein may be direct ohmic contacts which may include direct bonding/oxide bonding or adding a small amount of metal such as a pad between, for example, through silicon vias.

(36) FIGS. 5A and 5B are side-view schematics of interposers with electronic components positioned in cavities according to embodiments. Following the formation of cavities in interposer 500, four electronic components (dies 510, 515, 520, 525) are then assembled within the cavities using a variety of electrical connection methods (e.g. copper pillar or micro bumps). A plurality of dies are placed within or entirely within a cavity of an interposer in embodiments. Interposer 500 is then electrically and mechanically attached to printed circuit board 530 using solder balls 540. Multiple interposers having dies placed in cavities may be stacked vertically and electrically/mechanically attached to a printed circuit board, according to embodiments, as further shown in FIG. 5B.

(37) FIGS. 6A, 6B and 6C are side-view and perspective view schematics of interposers with electronic components positioned in a clearance created by standoff interposers according to embodiments. No cavity is created in interposer 630, however, clearance for die is provided by standoff interposers 600. Silicon cap 650 may be used to create a confined channel for fluid flow. Silicon cap 650 may include a redistribution layer on the bottom for routing electrical signals in the completed semiconductor package which is shown assembled in FIG. 6B. Silicon cap 650 (or a cap more generally) may include passive components or active components in embodiments. Silicon cap 650 may have no electrical connections on the top, according to embodiments, to increase security and to provide protection against probing by electrical taps. Alternatively, silicon cap 650 may be replaced by an interposer with through-connections such as through-substrate vias in embodiments. All elements of the package depicted in FIG. 6A can be manufactured separately and may have bonding pads (610, 620, 640) included for electrical connections in the assembled configuration of FIG. 6B. Thermocompression bonding or low temperature bonding method may be used to fuse all the elements together according to embodiments. The perspective view of FIG. 6C shows the assembled device with silicon cap 650 removed to allow viewing of some 3-d aspects of the semiconductor package. Standoff interposers 600 may be linearly parallel to one another as shown and may be positioned near two edges of interposer 630 to create a path for fluid or air flow in embodiments. Standoff interposers, interposers and caps may all be formed from the same semiconducting material (e.g. silicon), in embodiments, to match the coefficients of thermal expansion and reduce application of repetitive stresses.

(38) The dimensions of interposers and standoff interposers described herein vary widely. Interposers may be as large as a full wafer, e.g. hundreds of millimeters across. Interposers may be as small as several millimeters across (e.g. 5 mm5 mm). The interposers may be asymmetric as well for certain applications. Cavities may vary in dimensions as well and may depend on the size of the electronic component (e.g. a monolithic integrated circuit) ultimately placed within the cavity as well as the number of connections across the interposer outside the cavity (where the interposer-interposer direct connection is made). Cavity widths may be between 10% and 90%, 20% to 70% or 20% to 40% of the width of the interposer itself according to embodiments. Correspondingly, standoff interposer widths may be between 5% and 45%, between 15% and 40% or between 30% and 40% of the width of the interposer in embodiments. Cavity depths may be between 50 m and 300 m, between 75 m and 250 m or between 100 m and 200 m according to embodiments. Correspondingly, standoff interposer heights may be between 25 m and 1,000 m, between 50 m and 300 m, between 75 m and 250 m or between 100 m and 200 m according to embodiments. These dimensions apply to all embodiments described herein.

(39) FIGS. 7A and 7B are side view schematics of interposers with electronic components positioned in clearance formed by a combination of standoff interposers and a cavity according to embodiments. A cavity 700 is formed on the top side of silicon interposer 710. Electrical components are then electrically and mechanically attached to silicon interposer 710 and attachment may occur prior to assembly in embodiments. The electrical components in the example include two (e.g. monolithic) integrated circuits 760 and 770. The electrical components may be entirely within cavity 700 according to embodiments (as with all components and cavities described herein). A silicon cap 740 is also formed and electrical components may be electrically and mechanically attached to the underside of silicon cap 740 in embodiments. FIG. 7B shows an integrated circuit 783, a passive electrical component 781 and an antenna 782. Electronic components will be used herein to describe integrated circuits or other active component, a passive electrical component such as an inductor, an antenna or a power source such as a battery according to embodiments. Integrated circuits may be used to refer to monolithic integrated circuits in embodiments. Standoff interposers 720 (which may be silicon as with all interposers herein) are also formed and used to attach a cap 740 to interposer 710 (each of which may also be silicon in all examples herein) and also to leave an additional clearance for the additional electronic components (783, 781 and 782). Standoff interposers 720 may also provide high density electrical routing and connectivity between interposer 710 and cap 740. Again, cap 740 may be included to improve security (as with all embodiments described herein) and also to confine a fluid flow channel to increase the speed and concentration of the coolant flow. The height of the cavity and/or the height of the silicon stand-off help determine the cooling effectiveness and may be selected based on thermal management considerations.

(40) FIG. 8A is a side view schematic of a portion of a semiconductor package with electronic components positioned in multiple stacked cavities according to embodiments. FIG. 8A shows an embodiment where no silicon standoffs are used but electronic components 830 (e.g. monolithic integrated circuits) are placed among a plurality of vertically arranged cavities in a stack of interposers 810. Thermocompression or low temperature bonding may be used to bond interposers 810 directly together for enhanced miniaturization and to form a low profile package. In all embodiments herein, the clearances and/or cavities may or may not be filled with molding compound. All sides of the semiconductor packages described herein may be closed to enhance security especially in cases where the design does not require a coolant fluid (e.g. air) to be flowed through the channel to cool the (e.g. monolithic) integrated circuits.

(41) FIG. 8B is a side view schematic of a portion of a semiconductor package with electronic components positioned in cavities on both sides of a single interposer according to embodiments. Standoff interposers 820 are also present to create a clearance between interposer 810-5 and interposer 810-6. Note that the top interposers (810-4 and 810-6) may also be caps or silicon caps as before in embodiments. Electronic components 830 of FIG. 8B may be located entirely within cavities made in an interposer as shown. The cavities are defined as stopping at the top or bottom plane of the interposer (e.g. the dotted line) and the clearance begins at the dotted line and continues to the top or bottom surface of the nearest neighboring interposer. In other words, the clearance is defined by the height of standoff interposers 820. Electronic components may be placed partially or wholly inside a cavity, not only to increase packing density, but also to make electronic probing of the electrical connections (e.g. ball grid arrays) on the underside of the electronic components according to embodiments.

(42) FIGS. 9A and 9B are a side-view schematic and a perspective view of a portion of a semiconductor package with electrical components 930 positioned in clearances created by standoff interposers 920 according to embodiments. Components may be assembled using direct thermocompression or low temperature bonding methods on an interposer 910 without a cavity in embodiments. FIGS. 9A and 9B illustrate an example of a very low profile semiconductor package in which there is little or no gap on the side of the electrical component 930 opposite from the electrical and mechanical attachment according to embodiments. The height of the standoff interposers 920 may be the same or within 5% of the height of the electrical components 930 located on the same level in embodiments. The front and back of the semiconductor package (FIGS. 9A-9B) may still be left open to allow some small amount of cooling fluid flow.

(43) FIGS. 10A and 10B are a side-view schematic and a perspective view of a portion of a semiconductor package with electrical components 1030 positioned in clearances created by standoff interposers 1020 according to embodiments. Components may be assembled using direct thermocompression or low temperature bonding methods on an interposer 1010 without a cavity in embodiments. Alternatively, solder balls may be used when the clearance is adequate according to embodiments. FIGS. 10A and 10B illustrate an example of a high electric component density semiconductor package in which there are electronic components 1030 near the top and bottom a clearance created by standoff interposers 1020 between interposers 1010 in embodiments. In applications where thermal generation is more significant, thicker standoff interposers may be used to create adequate passage for fluid flow according to embodiments. The height of the standoff interposers 1020 may be greater than twice the height of electronic components 1030 or greater than thrice the height of electronic components 1030 in embodiments. As with all embodiments described herein, the front and back of the semiconductor package (FIGS. 10A-10B) may be left open to allow some small amount of cooling fluid flow or else the remaining clearance may be filled with molding compound to encapsulate the electronic components 1030 according to embodiments.

(44) FIGS. 11A and 11B are side-view schematics of portions of semiconductor packages with electronic components positioned in clearances created by standoff interposers according to embodiments. Embodiments implementing solder bumps in place of thermocompression or low temperature bonding are shown. A cap (e.g. an interposer cap or a silicon cap) may be incorporated at the top of the stack to increase security of the completed semiconductor package in embodiments. As with all embodiments described herein, electronic components may be assembled on interposers using solder bumps or copper pillars according to embodiments. The underside of the caps may be configured with redistribution layers but no connections may be present on the top or through the caps in embodiments. A semiconductor interposer right below the cap (e.g. the silicon cap in FIG. 11B) may provide additional routing channels on the top for routing signals or power according to embodiments. The cap on the top may contain one or more antennas to allow package-to-package or stack-to-stack wireless communication in embodiments. FIGS. 12A and 12B are side-view schematics of portions of semiconductor packages showing a standoff interposer between two other standoff interposers. Complex scalable systems may be formed using multiple standoff interposers placed at various intervals to allow high bandwidth chip-to-chip communication in embodiments. Three or more standoff interposers may be implemented to provide additional structure to a semiconductor package according to embodiments.

(45) FIGS. 13A and 13B are top-view schematics of portions of semiconductor packages with electronic components positioned in clearances created by standoff interposers according to embodiments. Shown are interposer 1310, electronic component 1330, standoff interposer 1320, a battery and a storage register. Standoff interposer 1320-1 may encircle electronic components or standoff interposer 1320-2 may not encircle electronic components (which allows an air channel for example) in embodiments. Security may be increased by reducing or eliminating access to electrical signals within a semiconductor package in embodiments. An energy source (e.g. a battery) may be included, according to embodiments, to allow continued operation of electronic components for a period of time when power is interrupted. During this period of time, stored code may be executed which completes an operation such as a transfer, cleans up (e.g. zeros storage locations), scrambles and/or encrypts the data present in various memory locations in or near an integrated circuit (e.g. the storage register). The energy source is shown inside the package in FIGS. 13A and 13B but may be located outside or completely off the semiconductor package in embodiments.

(46) FIG. 14 is a top-view schematic of a portion of a semiconductor package with electronic components positioned in clearances created by standoff interposers according to embodiments. The standoff interposer shown in FIG. 14 encircles electronic components as was the case for standoff interposer 1320-1 in FIG. 13A to increase security by making signals more difficult to tap into during operation in the field. Signal vias (1401, 1450) pass through the standoff interposer and expanded views are included as a visual convenience. Dummy vias (1410, 1420, 1430, 1440, 1460, 1470) may be included to obscure electromagnetic signals which may otherwise be read, e.g. outside the semiconductor package, according to embodiments. Two columns of dummy vias (1410, 1420) are included outside of signal vias 1401. The example involves dummy vias but dummy vias may also be replaced by power supply vias which then serve two purposes in embodiments. According to alternative embodiments, power supply vias may be protected by dummy vias since sensitive signals may sometimes ride on the power supply voltage. All vias which are helpful in shielding or obscuring sensitive signals may be referred to as signal-blocking vias. Two columns of dummy vias are shown outside (1430, 1440) and inside (1460, 1470) the signal vias 1450. The dummy vias may simply obscure an electromagnetic signal outside the semiconductor package or may conduct dummy/gibberish electrical signals intentionally included to further obscure the electromagnetic signal from signal vias (1401, 1450) or from power supplies in some cases. One column of dummy vias may be included on the outside or inside of a column of signal vias in embodiments. One column of dummy vias may be included on the outside and inside of a column of signal vias according to embodiments. Two or more columns of dummy vias may be included on the outside or inside of a column of signal vias in embodiments. The two (or more) columns of dummy vias may be staggered (as shown e.g. with dummy vias 1410 and 1420) to further avoid having meaningful electromagnetic signals pass to the outside of a semiconductor package according to embodiments. Generally speaking, a variety of signal transmission items may be used beyond the exemplary vias (1401, 1450). The signal transmission items may, for example, be vias, solder bumps or pads in embodiments.

(47) FIG. 15 is a top-view schematic of a portion of a standoff interposer according to embodiments. Signal vias 1501 (or power vias in embodiments) may be shielded on the outside, the inside or both sides by a column of signal-blocking vias (e.g. ground supply, power supply or dummy vias 1510) according to embodiments. The column of signal-blocking vias 1510 (also referred to herein as cloaking vias) may be more closely spaced together compared to signal vias 1501 (or power vias in embodiments) to increase the security by discouraging propagation of electromagnetic signals outside a semiconductor package in embodiments.

(48) FIGS. 16A, 16B, 16C and 16D are top-view schematics of portions of semiconductor packages according to embodiments. To further minimize or eliminate tampering with the package from top and bottoms sides a series of mesh is created to mask the signal traces on layer below. In embodiments, ground mesh 1610-1 is created on a layer (e.g. layer one in the figure) with power mesh 1601-1 created in staggered position with respect to layer one on a separate layer (e.g. layer two). The presence of ground mesh 1610-1, a dummy mesh (not shown) and/or power mesh 1601-1 may mask signal traces 1620 (and power traces in embodiments) routed on layer three increasing privacy and security. Ground mesh 1610-2 and power mesh 1601-2 may both be present on a single layer or each of multiple layers in embodiments. FIG. 16D shows power mesh 1601-2 and ground mesh 1610-2 on each of layer one and layer two to thwart attempts to tap the electromagnetic signals formed by signal traces 1620. These techniques may also be used inside or on the integrated circuits to improve security as well.

(49) FIG. 17 is a side view schematic of a portion of a semiconductor package with keyed electronic components positioned within a clearance according to embodiments. A security code/master key may be stored inside integrated circuit 1701 in embodiments such that only select additional chips (also storing the corresponding key) may operate properly when present in the same semiconductor package. Integrated circuits (1710, 1720, 1730) are equipped with the proper security code in the example. According to embodiments, some or all keyed integrated circuits may be located within a clearance as shown, or located in a cavity according to embodiments. One or a plurality of integrated circuits may have the matching code to select the difficulty associated with a potential counterfeiting operation.

(50) Electronic packages described herein may include high-performance miniature scalable and secure processing units equipped with a variety of integrated circuit types. A plurality of processors may be mounted on one side of an interposer while a plurality of memory dies may be mounted on the opposite side in embodiments. Processor cores may be mounted on one side of an interposer while memory is mounted on the opposite side according to embodiments. Processor cores and memory dies may be interspersed on both sides of an interposer in embodiments. According to embodiments, processor cores and memory dies may be both present on each side of an interposer but segregated into homogeneous integrated circuit groups. A homogeneous group of processor cores may be separated from a homogeneous group of memory dies by a standoff interposer in embodiments.

(51) FIGS. 18A and 18B are side-view schematics of portions of semiconductor packages with electronic components positioned in clearances created by standoff interposers according to embodiments. Semiconductor packaged described herein may be scalable heterogeneous units for internet-of-things (IOT) applications. A plurality of sensors may be place on one side of the interposer while an analog-to-digital convertor maybe placed on the opposite side or same side as the sensors. Processors and memory units may be placed in the lower stacks of the semiconductor package. A cap (e.g. a silicon cap) may be used, in embodiments, in situations where the presence of a silicon cap may not interfere with the operation of the sensors (see FIG. 18A). Sensors may be placed on top of an uppermost interposer (FIG. 18B) to facilitate access of the sensors to environmental conditions.

(52) Semiconductor packages described herein may include heterogeneous or homogeneous memory units in embodiments. Memory dies may be placed on one side or both sides interposers while high bandwidth standoff interposers may be used with bumps or compression bonding attachments method. Dimensions of the high bandwidth standoff interposers may be selected to manage heat generated during the operation of the electronic components (memory in this case).

(53) FIG. 19 and FIG. 20 are perspective views of portions of semiconductor packages according to embodiments. Previous examples showed standoff interposers in the form of walls aligned in the same direction, in part, to guide airflow and promote cooling in embodiments. Standoff interposers may also be more discrete elements positioned at regular intervals in a two-dimensional array (FIG. 19) according to embodiments. FIG. 20 shows a more irregular distribution of standoff interposers still positioned discretely across the two-dimensional surface of an interposer. The distribution may be random in embodiments. Generally speaking, standoff interposers may be of any size or shape and may be located anywhere on the substrate to provide high speed and/or high bandwidth local connections among nearby electronic components (e.g. die as shown).

(54) Semiconductor packages and devices formed according to the designs described herein may be used to form higher performance, cooler, more secure and tamper resistant, and more scalable 2.5D/3D heterogeneous systems than prior art designs.

(55) Having disclosed several embodiments, it will be recognized by those of skill in the art that various modifications, alternative constructions, and equivalents may be used without departing from the spirit of the disclosed embodiments. Additionally, a number of well-known processes and elements have not been described to avoid unnecessarily obscuring the embodiments described herein. Accordingly, the above description should not be taken as limiting the scope of the claims.

(56) Where a range of values is provided, it is understood that each intervening value, to the tenth of the unit of the lower limit unless the context clearly dictates otherwise, between the upper and lower limits of that range is also specifically disclosed. Each smaller range between any stated value or intervening value in a stated range and any other stated or intervening value in that stated range is encompassed. The upper and lower limits of these smaller ranges may independently be included or excluded in the range, and each range where either, neither or both limits are included in the smaller ranges is also encompassed within the embodiments described, subject to any specifically excluded limit in the stated range. Where the stated range includes one or both of the limits, ranges excluding either or both of those included limits are also included.

(57) As used herein and in the appended claims, the singular forms a, an, and the include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to a process includes a plurality of such processes and reference to the dielectric material includes reference to one or more dielectric materials and equivalents thereof known to those skilled in the art, and so forth.

(58) Also, the words comprise, comprising, include, including, and includes when used in this specification and in the following claims are intended to specify the presence of stated features, integers, components, or steps, but they do not preclude the presence or addition of one or more other features, integers, components, steps, acts, or groups.