Disclosed is an interconnect structure including a substrate, a conductive layer on the substrate, and a passivation layer in contact with the conductive layer, where the passivation layer includes a first layer including boron nitride (h-BN) having a hexagonal crystal structure and a second layer including amorphous boron nitride (a-BN), and the first layer is in contact with the conductive layer the first layer.

A method for forming at least one Ag or Ag based alloy feature in an integrated circuit, including providing a blanket layer of Ag or Ag based alloy in a multi-layer structure on a substrate. The method further includes providing a hard mask layer over the blanket layer of Ag or Ag based alloy. The method further includes performing an etch of the blanket layer of Ag or Ag based alloy, wherein a portion of the blanket layer of Ag or Ag based alloy that remains after the etch forms one or more conductive lines. The method further includes forming a liner that surrounds the one or more conductive lines. The method further includes depositing a dielectric layer on the multi-layer structure.

A semiconductor structure and a manufacturing method thereof are provided. The manufacturing method includes the following steps. A trench is formed in a first interlayer dielectric (ILD) layer. A metal conductor with metal dopants is filled in the trench. Planarization is performed on the metal conductor with the metal dopants. A thermal treatment, a photo treatment or a bias-assist treatment is performed on the metal conductor with the metal dopants to form a self-forming metal capping layer on a first metal layer. An etching stop bi-layer structure is formed on the first interlayer dielectric layer and the self-forming metal capping layer. A via, a second interlayer dielectric (ILD) layer and a second metal layer are formed on the etching stop bi-layer structure. The via is embedded in the second interlayer dielectric layer and the via is disposed between the first metal layer and the second metal layer.

Embodiments of a semiconductor wafer having wafer-level die attach metallization on a back-side of the semiconductor wafer, resulting semiconductor dies, and methods of manufacturing the same are disclosed. In one embodiment, a semiconductor wafer includes a semiconductor structure and a front-side metallization that includes front-side metallization elements for a number of semiconductor die areas. The semiconductor wafer also includes vias that extend from a back-side of the semiconductor structure to the front-side metallization elements. A back-side metallization is on the back-side of the semiconductor structure and within the vias. For each via, one or more barrier layers are on a portion of the back-side metallization that is within the via and around a periphery of the via. The semiconductor wafer further includes wafer-level die attach metallization on the back-side metallization other than the portions of the back-side metallization that are within the vias and around the peripheries of the vias.

An interconnection structure includes a first dielectric layer, a second dielectric layer, a first conductive feature, and a second conductive feature. The second dielectric layer is disposed on one side of the first dielectric layer. The first conductive feature is embedded in the first dielectric layer or the second dielectric layer, the second conductive feature is embedded in the first dielectric layer or the second dielectric layer, wherein the first The conductive feature includes a first conductive material, the second conductive feature includes a second conductive material and a barrier layer, the first conductive material is different from the second conductive material. The first conductive material does not contain copper, and the second conductive material contains copper.

An interconnect structure including a dielectric layer; a conductive wiring including a first cobalt-metal alloy within a trench structure of the dielectric layer; and a cobalt-containing auxiliary layer between the conductive wiring and the dielectric layer, wherein the cobalt-containing auxiliary layer includes cobalt or a second cobalt-metal alloy.

The present disclosure provides a semiconductor device and a method of manufacturing a semiconductor device. The semiconductor device comprises a substrate, an isolation layer, a first electronic device, a first interconnection structure, a first conductive structure, and a second conductive structure. The substrate has a first surface and a second surface opposite the first surface. The isolation layer contacts the second surface of the substrate and has a first surface facing away from the substrate. The first electronic device is embedded in the substrate. The first interconnection structure extends from the first surface of the substrate to the first surface of the isolation layer. The first conductive structure is disposed on the first surface of the substrate. The second conductive structure contacts the first surface of the isolation layer. The first conductive structure and the second conductive structure are electrically connected by the first interconnection structure.

Provided are an interconnect structure and an electronic device including the same. The interconnect structure may include a conductive wiring having a certain pattern, a dielectric layer on side surfaces of the conductive wiring, a capping layer on the conductive wiring, and a graphene layer on the dielectric layer. The graphene layer may include a graphene material. A ratio of carbons having sp.sup.3 bonds to carbons having sp.sup.2 bonds in the graphene material is 1 or less.

Provided is a semiconductor device including an activation pattern extended in a first direction, a gate electrode having portions of the gate electrode spaced apart in the first direction on the activation pattern, and extending in a second direction intersecting the first direction, a gate contact on the gate electrode, a source/drain pattern on the activation pattern, a source/drain contact on the source/drain pattern, an insulation layer over the gate contact and the source/drain contact, a via penetrating the insulation layer, wherein the via is on at least one of the gate contact or the source/drain contact, an adhesion layer on the insulation layer, wherein the adhesion layer exposes an upper surface of the via, and an interconnection layer on the first adhesion layer, wherein the upper surface of the via is in contact with a first portion of the interconnection layer, and wherein the first adhesion layer includes tantalum boride (TaB) or an alloy of TaB.

The present disclosure provides a semiconductor device and a method of manufacturing a semiconductor device. The semiconductor device comprises a substrate, an isolation layer, a first electronic device, a first interconnection structure, a first conductive structure, and a second conductive structure. The substrate has a first surface and a second surface opposite the first surface. The isolation layer contacts the second surface of the substrate and has a first surface facing away from the substrate. The first electronic device is embedded in the substrate. The first interconnection structure extends from the first surface of the substrate to the first surface of the isolation layer. The first conductive structure is disposed on the first surface of the substrate. The second conductive structure contacts the first surface of the isolation layer. The first conductive structure and the second conductive structure are electrically connected by the first interconnection structure.