A semiconductor device includes an upper electrode; a lower electrode; a substrate positioned between the upper electrode and the lower electrode; a buried electrode part positioned between the substrate and the upper electrode, the buried electrode part including a gate electrode; and a silicon layer positioned between the substrate and the upper electrode. The silicon layer includes a mesa part next to the buried electrode part, a first region positioned between the mesa part and the substrate, and a second region positioned between the buried electrode part and the substrate. An energy level density of the first region is greater than an energy level density of the second region.

Diodes, transistors, and other devices having a class IV channel region and a class III-V drift region are described. The class IV channel region, such as a Si channel region, is able to provide all associated advantages, such as ease of manufacturing of many different types of devices, using cost-effective materials and techniques. Meanwhile, the III-V drift region provides substantially lower R.sub.on_sp than a conventional class IV drift region, and substantially enhances the operational behaviors of resulting devices, without sacrificing other parameters, such as size or breakdown voltage.

According to one embodiment, a method for manufacturing a semiconductor device is disclosed. The method can include a first process of causing a stacking fault of a first semiconductor layer to expand. The first semiconductor layer includes silicon carbide and a first element and is provided on a base body including silicon carbide. The first element includes at least one selected from the group consisting of N, P, and As. The method can include a second process of forming a second semiconductor layer on the first semiconductor layer after the first process. The second semiconductor layer includes silicon carbide and the first element. The method can include a third process of forming a third semiconductor layer on the second semiconductor layer. The third semiconductor layer includes silicon carbide and a second element. The second element includes at least one selected from the group consisting of B, Al, and Ga.

A vertical power semiconductor device is proposed. The vertical power semiconductor device includes a semiconductor body having a first main surface and a second main surface opposite to the first main surface along a vertical direction. The vertical power semiconductor device further includes a drift region in the semiconductor body. The drift region includes platinum atoms. The vertical power semiconductor device further includes a field stop region in the semiconductor body between the drift region and the second main surface. The field stop region includes a plurality of impurity peaks. A first impurity peak of the plurality of impurity peaks has a larger concentration than a second impurity peak of the plurality of impurity peaks. The first impurity peak includes hydrogen and the second impurity peak includes helium.

A semiconductor device comprises a source/drain diffusion area, and a first doped region. The source/drain diffusion area is defined between a first isolation structure and a second isolation structure. The source/drain diffusion area includes a source region, a drain region, and a device channel. The device channel is between the source region and the drain region. The first doped region is disposed along a first junction between the device channel and the first isolation structure in a direction from the source region to the drain region. The first doped region is separated from at least one of the source region and the drain region, and has a dopant concentration higher than that of the device channel. The semiconductor device of the present disclosure has low random telegraph signal noise and fewer defects.

Methods of forming a self-aligned gate (SAG) and self-aligned source (SAD) device for high E.sub.crit semiconductors are presented. A dielectric layer is deposited on a high E.sub.crit substrate. The dielectric layer is etched to form a drift region. A refractory material is deposited on the substrate and dielectric layer. The refractory material is etched to form a gate length. Implant ionization is applied to form high-conductivity and high-critical field strength source with SAG and SAD features. The device is annealed to activate the contact regions. Alternately, a refractory material may be deposited on a high E.sub.crit substrate. The refractory material is etched to form a channel region. Implant ionization is applied to form high-conductivity and high E.sub.crit source and drain contact regions with SAG and SAD features. The refractory material is selectively removed to form the gate length and drift regions. The device is annealed to activate the contact regions.

An amplifier circuit includes a first FET including a first semiconductor layer, a first source electrode, a first gate electrode, a first drain electrode and a first source wall having at least a part thereof provided above the first semiconductor layer between the first gate electrode and the first drain electrode, and a second FET including a second semiconductor layer, a second source electrode, a second gate electrode, a second drain electrode and a second source wall having at least a part thereof provided above the second semiconductor layer between the second gate electrode and the second drain electrode, wherein a length of the second source wall in a direction in which the second source electrode and the second drain electrode are arranged is smaller than that of the first source wall in a direction in which the first source electrode and the first drain electrode are arranged.

A device includes a cell, wherein each cell includes a body having a main top surface and a main bottom surface, a gate on the main surface on the device having a first length, a gate isolation layer over the gate having a second length at least twice as long as the first length, a source contact in the device body adjacent to the gate, a source metal layer over the gate isolation layer, and a drain on the main bottom surface of the cell.

Embodiments disclosed herein include semiconductor devices and methods of forming such devices. In an embodiment a semiconductor device comprises a substrate, a source region over the substrate, a drain region over the substrate, and a semiconductor body extending from the source region to the drain region. In an embodiment, the semiconductor body has a first region with a first conductivity type and a second region with a second conductivity type. In an embodiment, the semiconductor device further comprises a gate structure over the first region of the semiconductor body, where the gate structure is closer to the source region than the drain region.

A field effect transistor includes a substrate comprising a fin structure. The field effect transistor further includes an isolation structure in the substrate. The field effect transistor further includes a source/drain (S/D) recess cavity below a top surface of the substrate. The S/D recess cavity is between the fin structure and the isolation structure. The field effect transistor further includes a strained structure in the S/D recess cavity. The strain structure includes a lower portion. The lower portion includes a first strained layer, wherein the first strained layer is in direct contact with the isolation structure, and a dielectric layer, wherein the dielectric layer is in direct contact with the substrate, and the first strained layer is in direct contact with the dielectric layer. The strained structure further includes an upper portion comprising a second strained layer overlying the first strained layer.