An integrated power semiconductor device, includes devices integrated on a single chip. The devices include a vertical high voltage device, a first high voltage pLDMOS device, a high voltage nLDMOS device, a second high voltage pLDMOS device, a low voltage NMOS device, a low voltage PMOS device, a low voltage NPN device, and a low voltage diode device. A dielectric isolation is applied to the first high voltage pLDMOS device, the high voltage nLDMOS device, the second high voltage pLDMOS device, the low voltage NMOS device, the low voltage PMOS device, the low voltage NPN device, and the low voltage diode device. A multi-channel design is applied to the first high voltage pLDMOS device, and the high voltage nLDMOS device. A single channel design is applied to the second high voltage pLDMOS device.

A silicon carbide MOSFET includes first and second source regions respectively disposed in the first and second well regions. Each of the first and second source regions extends up to a top surface of the substrate. First and second channel regions of the respective first and second well regions laterally separate the first and second source regions from a JFET region by a channel length. The first and second channel regions extend up to the top surface. The first and second channel regions are each arranged in a wave-shaped pattern at the top surface of the substrate. The wave-shaped pattern extends in first and second lateral directions. In an on-state, current flows laterally from the first and second source regions to the JFET region, and then in a vertical direction down through an extended drain region to the drain region.

Embodiments of a semiconductor device and methods of forming thereof are provided herein. In some embodiments, a power semiconductor device may include a first layer having a first conductivity type; a second layer disposed atop the first layer, the second layer having the first conductivity type; a termination region formed in the second layer, the termination region having a second conductivity type opposite the first type; and an active region at least partially formed in the second layer, wherein the active region is disposed adjacent to the termination region proximate a first side of the termination region and wherein the second layer is at least partially disposed adjacent to the termination region proximate a second side of the termination region opposite the first side.

A transistor structure includes a source region and a drain region disposed in a substrate, extending along a first direction. A polysilicon layer is disposed over the substrate, extending along a second direction perpendicular to the first direction, wherein the polysilicon layer includes a first edge region, a channel region and a second edge region formed as a gate region between the source region and the drain region in a plane view. The polysilicon layer has at least a first opening pattern at the first edge region having a first portion overlapping with the gate region; and at least a second opening pattern at the second edge region having a second portion overlapping with the gate region.

A gallium nitride transistor includes a substrate on which a source region, a drain region, a drift region and a gate region are defined. The drift region extends between the source region and the drain region. The gate region includes a combination of enhancement-mode and depletion-mode devices that are positioned across the drift region and are used together to control charge density and mobility of electrons in the drift region with a relatively low threshold voltage (V.sub.th). Enhancement-mode devices are formed using a P-type layer disposed on the substrate and coupled to a gate electrode.

A semiconductor device includes a layer stack with a plurality of first semiconductor layers of a first doping type and a plurality of second semiconductor layers of a second doping type complementary to the first doping type. The first and second semiconductor layers are arranged alternatingly between first and second surfaces of the layer stack. A first semiconductor region of a first semiconductor device adjoins the first semiconductor layers. Each of at least one second semiconductor region of the first semiconductor device adjoins at least one of the plurality of second semiconductor layers, and is spaced apart from the first semiconductor region. Each of at least one barrier layer configured to form a diffusion barrier is arranged in parallel to the first surface and to the second surface and adjacent to one of the first semiconductor layers, or adjacent to one of the second semiconductor layers, or both.

A gallium nitride transistor includes one or more P-type hole injection structures that are positioned between the gate and the drain. The P-type hole injection structures are configured to inject holes in the transistor channel to combine with trapped carriers (e.g., electrons) so the electrical conductivity of the channel is less susceptible to previous voltage potentials applied to the transistor.

A semiconductor device 1 includes a trench gate structure 6 formed in a surface layer portion of a first principal surface of a semiconductor layer. A source region 10 and a well region 11 are formed in a surface layer portion of the first principal surface of the semiconductor layer at a side of the trench gate structure 6. The well region 11 is formed in a region at a side of the second principal surface of the semiconductor layer with respect to the source region 10. A channel is formed along the trench gate structure 6 in a portion of the well region 11. A multilayer region 22 is formed in a region between the trench gate structure 6 and the source region 10 in the semiconductor layer. The multilayer region 22 has a p type impurity region 20 formed in the surface layer portion of the first principal surface of the semiconductor layer and an n type impurity region 21 formed in a side of the second principal surface of the semiconductor layer with respect to the second conductivity type impurity region 20.

A transistor structure includes a source region and a drain region disposed in a substrate, extending along a first direction. A polysilicon layer is disposed over the substrate, extending along a second direction perpendicular to the first direction, wherein the polysilicon layer includes a first edge region, a channel region and a second edge region formed as a gate region between the source region and the drain region in a plane view. The polysilicon layer has at least a first opening pattern at the first edge region having a first portion overlapping with the gate region; and at least a second opening pattern at the second edge region having a second portion overlapping with the gate region.

A shield trench power device such as a trench MOSFET or IGBT employs a gate structure with an underlying polysilicon shield region overlying a shield region in an epitaxial or crystalline layer of the device. The polysilicon region may be laterally confined by spacers in a gate trench and may contact or be isolated from the underlying shield region. Alternatively, the polysilicon region may be replaced with an insulating region.