Patent classifications
H01L29/78684
High performance multi-dimensional device and logic integration
A semiconductor device is provided. The semiconductor device can include a bottom substrate, a device plane over the bottom substrate, a dielectric layer over the device plane, localized substrates over the dielectric layer, and semiconductor devices over the localized substrates. The localized substrates can be separated from each other along a top surface of the bottom substrate. A method of microfabrication is provided. The method can include forming a target layer over a bottom substrate where the target layer includes one or more localized regions that include one or more semiconductor materials. The method can also include performing a thermal process to change crystal structures of the one or more localized regions of the target layer. The method can further include forming semiconductor devices over the localized regions of the target layer.
Enabling residue free gap fill between nanosheets
A semiconductor structure and a method for fabricating the same. The semiconductor structure includes at least a first channel region and a second channel region. The first channel region and the second channel region each include metal gate structures surrounding a different nanosheet channel layer. The metal gate structures of the first and second channel regions are respectively separated from each other by an unfilled gap. The method includes forming a gap fill layer between and in contact with gate structures surrounding nanosheet channel layers in multiple channel regions. Then, after the gap fill layer has been formed for each nanosheet stack, a masking layer is formed over the gate structures and the gap fill layer in at least a first channel region. The gate structures and the gap fill layer in at least a second channel region remain exposed.
Method for the nanoscale etching of a germanium-tin alloy (GeSn) for a FET transistor
A method for the nanoscale etching of a layer of Ge.sub.1-xSn.sub.x on a carrier for a FET transistor, x being the concentration of tin in the GeSn alloy, the etching method includes a step of plasma-etching the layer of Ge.sub.1-xSn.sub.x using a mixture comprising dichlorine (Cl.sub.2) and dinitrogen (N.sub.2) and under an etching pressure lower than or equal to 50 mTorr, preferably lower than or equal to 10 mTorr. A method for producing a conduction channel on a carrier for a FET transistor, comprising a step of forming a layer of Ge.sub.1-xSn.sub.x on the carrier, the layer being produced by epitaxial growth, and a step of etching the layer of Ge.sub.1-xSn.sub.x according to the etching method. A conduction channel made of Ge.sub.1-xSn.sub.x for a FET transistor, the channel being obtained according to the production method, and a FET transistor comprising a plurality of conduction channels made of Ge.sub.1-xSn.sub.x.
Nanowire for transistor integration
Particular embodiments described herein provide for an electronic device that can include a nanowire channel. The nanowire channel can include nanowires and the nanowires can be about fifteen (15) or less angstroms apart. The nanowire channel can include more than ten (10) nanowires and can be created from a MXene material.
Semiconductor device
A semiconductor device includes an active region in a substrate, at least one nano-sheet on the substrate and spaced apart from a top surface of the active region, a gate above or below the nano-sheet, a gate insulating layer between the at least one nano-sheet and the gate, and source/drain regions on the active region at both sides of the at least one nano-sheet. The at least one nano-sheet includes a channel region; a gate disposed above or below the nano-sheet and including a single metal layer having different compositions of metal atoms of a surface and an inside thereof; a gate insulating layer between the nano-sheet and the gate; and source/drain regions disposed in the active region of both sides of the at least one nano-sheet.
RESISTANCE MEASURING STRUCTURES OF STACKED DEVICES
Resistance measuring structures for a stacked integrated circuit device are provided. The resistance measuring structures may include a first Complementary Field Effect Transistor (CFET) stack, a second CFET stack, and a conductive connection. The first CFET may include a first upper transistor that includes a first upper drain region and a first lower transistor that is between the substrate and the first upper transistor and includes a first lower drain region. The second CFET may include a second upper transistor that includes a second upper drain region and a second lower transistor that is between the substrate and the second upper transistor and includes a second lower drain region. The conductive connection may electrically connect the first upper drain region and the second upper drain region.
SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME
A method of forming a semiconductor structure includes: providing an initial substrate having a first region and a second region; forming a first substrate on the initial substrate; forming a first insulating layer on the first substrate; forming a second substrate on the first insulating layer; removing the second substrate in the second region to form a second insulating layer on the first insulating layer in the second region; and forming a plurality of passive devices on the second insulating layer in the second region and forming a plurality of active devices on the second substrate in the first region.
Leakage-free implantation-free ETSOI transistors
A semiconductor device includes an extremely thin semiconductor-on-insulator substrate (ETSOI) having a base substrate, a thin semiconductor layer and a buried dielectric therebetween. A device channel is formed in the thin semiconductor layer. Source and drain regions are formed at opposing positions relative to the device channel. The source and drain regions include an n-type material deposited on the buried dielectric within a thickness of the thin semiconductor layer. A gate structure is formed over the device channel.
Vertical fin field effect transistor with a reduced gate-to-bottom source/drain parasitic capacitance
A method of forming a vertical fin field effect device is provided. The method includes, forming a vertical fin on a substrate, forming a masking block on the vertical fin, wherein the masking block extends a distance outward from the vertical fin sidewalls and endwalls, and a portion of the substrate surrounding the masking block is exposed. The method further includes removing at least a portion of the exposed portion of the substrate to form a recess and a fin mesa below the vertical fin, removing a portion of the fin mesa to form an undercut recess below an overhanging portion of the masking block, forming a spacer layer on the masking block and in the undercut recess, and removing a portion of the spacer layer to form an undercut spacer in the undercut recess.
DISPLAY PANEL AND DISPLAY DEVICE
A display panel and a display device are provided. A sub-pixel unit of the display panel includes at least one light-transmitting region, and each light-transmitting region is provided with at least one driving transistor. At least part of a source wiring of the driving transistor is disposed at a boundary of the light-transmitting region and parallel to an extension direction of data signal lines, and a drain wiring is disposed in the light-transmitting region. The light-transmitting region of the sub-pixel unit occupied by the driving transistor is reduced to alleviate a problem of low aperture ratio of a backplane of current display products.