A 3D semiconductor device including: a first single crystal layer with first transistors; overlaid by a first metal layer; a second metal layer overlaying the first metal layer and being overlaid by a third metal layer; a logic gates including at least the first metal layer interconnecting the first transistors; second transistors disposed atop the third metal layer; third transistors disposed atop the second transistors; a top metal layer disposed atop the third transistors; and a memory array including word-lines, and at least four memory mini arrays, where each of the memory mini arrays includes at least four rows by four columns of memory cells, where each of the memory cells includes at least one of the second transistors or third transistors, sense amplifier circuit(s) for each of the memory mini arrays, the second metal layer provides a greater current carrying capacity than the third metal layer.

The present disclosure provides a thin film transistor and a fabrication method thereof, an array substrate and a fabrication method thereof, and a display panel. The method for fabricating a thin film transistor includes: forming an active layer including a first region, a second region and a third region on a substrate; forming a gate insulating layer on a side of the active layer away from the substrate; forming a gate electrode on a side of the gate insulating layer away from the active layer; and ion-implanting the active layer from a side of the gate electrode away from the active layer, so that the first region is formed into a heavily doped region, the second region is formed into a lightly doped region, and the third region is formed into an active region.

A thin film transistor according to an embodiment includes a first semiconductor, a gate electrode overlapping the first semiconductor, a second semiconductor contacting a portion of the first semiconductor, and a source electrode and a drain electrode contacting the second semiconductor, the first semiconductor includes an oxide semiconductor, and the second semiconductor includes silicon.

A process includes (a) providing a semiconductor substrate having a planar surface; (b) forming a plurality of thin-film layers above the planar surface of the semiconductor substrate, one on top of another, including among the thin-film layers first and second isolation layers, wherein a significantly greater concentration of a first dopant specie is provided in the first isolation layer than in the second isolation layer; (c) etching along a direction substantially orthogonal to the planar surface through the thin-films to create a trench having sidewalls that expose the thin-film layers; (d) depositing conformally a semiconductor material on the sidewalls of the trench; (e) annealing the first isolation layer at a predetermined temperature and a predetermined duration such that the first isolation layer act as a source of the first dopant specie which dopes a portion of the semiconductor material adjacent the first isolation layer; and (f) selectively etching the semiconductor material to remove the doped portion of the semiconductor material without removing the remainder of the semiconductor material.

A method and apparatus for reducing as-deposited and metastable defects relative to amorphous silicon (a-Si) thin films, its alloys and devices fabricated therefrom that include heating an earth shield positioned around a cathode in a parallel plate plasma chemical vapor deposition chamber to control a temperature of a showerhead in the deposition chamber in the range of 350° C. to 600° C. An anode in the deposition chamber is cooled to maintain a temperature in the range of 50° C. to 450° C. at the substrate that is positioned at the anode. In the apparatus, a heater is embedded within the earth shield and a cooling system is embedded within the anode.

A thin film transistor 101 includes: a gate electrode 2, a semiconductor layer 4 disposed on the gate electrode via a gate insulating layer 3, a source electrode 8s disposed on a portion of the semiconductor layer 4 via a first contact layer Cs, and a drain electrode 8d disposed on another portion via a second contact layer Cd. The first and second contact layers have a multilayer structure including N (where N is an integer equal to or greater than 1) two-layer structures S(n) (where n is an integer not smaller than 1 and not greater than N), each two-layer structure S(n) including a first amorphous silicon layer 71 that is directly in contact with the source or drain electrode, a second amorphous silicon layer 72(n), and a third amorphous silicon layer 73(n) that is directly in contact with an upper face thereof. In each two-layer structure S(n), n type impurity concentrations C2(n) and C3(n) of the second amorphous silicon layer and the third amorphous silicon layer and an n type impurity concentration C1 of the first amorphous silicon layer satisfy C2(n)<C3(n)<C1 for any given n.

A 3D semiconductor device including: a first single crystal layer with first transistors; overlaid by a first metal layer; a second metal layer overlaying the first metal layer and being overlaid by a third metal layer; a logic gates including at least the first metal layer interconnecting the first transistors; second transistors disposed atop the third metal layer; third transistors disposed atop the second transistors; a top metal layer disposed atop the third transistors; and a memory array including word-lines, and at least four memory mini arrays, where each of the memory mini arrays includes at least four rows by four columns of memory cells, where each of the memory cells includes at least one of the second transistors or third transistors, sense amplifier circuit(s) for each of the memory mini arrays, the second metal layer provides a greater current carrying capacity than the third metal layer.

An anti-stress liquid crystal display structure and a manufacturing method are provided. The anti-stress liquid crystal display structure includes a first substrate, a plurality of thin film transistors, a second substrate, a plurality of pillar-shaped supporting elements, and a liquid crystal layer. The plurality of thin film transistors have a protection layer and include at least one first protruding part and at least one first concave part. One end of each of the pillar-shaped supporting elements is connected to the second substrate, and other end of each of the pillar-shaped supporting elements includes at least one second protruding part and at least one second concave part and is disposed on the protection layer of each of the thin film transistors. The liquid crystal layer is disposed between the first substrate and the second substrate.

A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer and control circuits; forming at least one second level above the first level; performing a first etch step including etching holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching holes within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where each of the first memory cells include one first transistor, where each of the second memory cells include one second transistor, where at least one of the first or second transistors has a channel, a source, and a drain having a same doping type.

A method for producing a 3D memory device including: providing a first level including a single crystal layer and control circuits, where the control circuits include a plurality of first transistors; forming at least one second level above the first level; performing a first etch step including etching holes within the second level; performing processing steps to form a plurality of first memory cells within the second level, where each of the first memory cells include one of a plurality of second transistors, where the control circuits include memory peripheral circuits, where at least one first memory cell is at least partially atop a portion of the memory peripheral circuits, and where fabrication processing of the first transistors accounts for a temperature and time associated with processing the second level and the plurality of second transistors by adjusting a process thermal budget of the first level accordingly.