An inertial sensor 1 includes: a base body; a lid body facing the base body; a functional element disposed in a cavity between the base body and the lid body and including a semiconductor layer; an adhesive layer disposed in a peripheral region surrounding the cavity and adhering the base body and the lid body to each other; and a sealer configured to seal a hole which communicates the cavity with an outside and which is disposed in the peripheral region. The sealer is provided in contact with the lid body and the base body, and includes a material of the lid body and a material of the adhesive layer.

An inertial sensor 1 includes: a base body; a lid body facing the base body; a functional element disposed in a cavity between the base body and the lid body and including a semiconductor layer; an adhesive layer disposed in a peripheral region surrounding the cavity and adhering the base body and the lid body to each other; and a sealer configured to seal a hole which communicates the cavity with an outside and which is disposed in the peripheral region. The sealer is provided in contact with the lid body and the base body, and includes a material of the lid body and a material of the adhesive layer.

A sensor device includes a conductive layer. The conductive layer is interposed between a first principal surface of an IC chip and a sensor element and faces the sensor element via a resin-based adhesive layer. The sensor element includes: a moving part including a moving electrode; a fixed part including a fixed electrode forming capacitance between the moving electrode and itself; a first terminal connected to the moving electrode; and a second terminal connected to the fixed electrode. The IC chip includes: a signal processor that processes a detection signal from the second terminal; a first voltage generator that generates a first voltage as an operating voltage for the processor; and a second voltage generator that generates a second voltage corresponding to the sensor element's reference potential applied to the first terminal. The conductive layer is electrically connected to the first terminal.

A sensor device includes a conductive layer. The conductive layer is interposed between a first principal surface of an IC chip and a sensor element and faces the sensor element via a resin-based adhesive layer. The sensor element includes: a moving part including a moving electrode; a fixed part including a fixed electrode forming capacitance between the moving electrode and itself; a first terminal connected to the moving electrode; and a second terminal connected to the fixed electrode. The IC chip includes: a signal processor that processes a detection signal from the second terminal; a first voltage generator that generates a first voltage as an operating voltage for the processor; and a second voltage generator that generates a second voltage corresponding to the sensor element's reference potential applied to the first terminal. The conductive layer is electrically connected to the first terminal.

A nut screwed around a rotating shaft with a view to securing a part to said shaft and to cooperate with a fixed sensor sensing a quantity of material in a pre-defined volume to measure the speed of rotation of the shaft, including a ring of teeth separated by slots. At least a portion of the teeth includes at least one recess maintaining the clamping function of the ring of teeth, the at least one recess forming, with notches separating the teeth, respective material deficit intervals detected by said sensor when passing through the detection volume during the rotation of the nut. A method of using the nut with a sensor in a rotational speed measuring device and the production of same.

A nut screwed around a rotating shaft with a view to securing a part to said shaft and to cooperate with a fixed sensor sensing a quantity of material in a pre-defined volume to measure the speed of rotation of the shaft, including a ring of teeth separated by slots. At least a portion of the teeth includes at least one recess maintaining the clamping function of the ring of teeth, the at least one recess forming, with notches separating the teeth, respective material deficit intervals detected by said sensor when passing through the detection volume during the rotation of the nut. A method of using the nut with a sensor in a rotational speed measuring device and the production of same.

An angular velocity sensor includes an angular velocity sensor element, a drive circuit, a detection circuit, and a reference potential supply circuit. The angular velocity sensor element has a monitor electrode, a drive electrode, a sense electrode, and a weight. The reference potential supply circuit supplies a reference potential to the angular velocity sensor element. The reference potential supply circuit has a first CV converter, a second CV converter, a comparator, and a reference potential adjustment circuit. The first CV converter is connected to the monitor electrode. The second CV converter is connected to the sense electrode. The comparator compares a frequency of a signal being output from the first CV converter with a frequency of a signal being output from the second CV converter, and outputs a signal depending on a result of the comparison.

An angular velocity sensor includes an angular velocity sensor element, a drive circuit, a detection circuit, and a reference potential supply circuit. The angular velocity sensor element has a monitor electrode, a drive electrode, a sense electrode, and a weight. The reference potential supply circuit supplies a reference potential to the angular velocity sensor element. The reference potential supply circuit has a first CV converter, a second CV converter, a comparator, and a reference potential adjustment circuit. The first CV converter is connected to the monitor electrode. The second CV converter is connected to the sense electrode. The comparator compares a frequency of a signal being output from the first CV converter with a frequency of a signal being output from the second CV converter, and outputs a signal depending on a result of the comparison.

Methods and systems for testing a sensor of a propeller blade angle position feedback system are described. A sensor signal is received from a sensor at a known position relative to a feedback device, the feedback comprising a ring and at least one pair of position markers spaced from one another around a circumference thereof, the sensor configured for successively detecting passage of the position markers as the feedback device rotates at a known rotational speed and an axial distance between the sensor and the feedback device varies. From the sensor signal a measured position of the sensor relative to the feedback device and a measured rotational speed of the feedback device are determined. The measured position and the measured rotational speed are compared to the known position and the known rotational speed to determine a sensor accuracy.

Methods and systems for testing a sensor of a propeller blade angle position feedback system are described. A sensor signal is received from a sensor at a known position relative to a feedback device, the feedback comprising a ring and at least one pair of position markers spaced from one another around a circumference thereof, the sensor configured for successively detecting passage of the position markers as the feedback device rotates at a known rotational speed and an axial distance between the sensor and the feedback device varies. From the sensor signal a measured position of the sensor relative to the feedback device and a measured rotational speed of the feedback device are determined. The measured position and the measured rotational speed are compared to the known position and the known rotational speed to determine a sensor accuracy.