An inspection apparatus includes a light sensor that detects light from a semiconductor device to which an electric signal has been input, an optical system that guides light from the semiconductor device to the light sensor, and a control device electrically connected to the light sensor. The control device includes a measurement unit that acquires waveform data obtained by optical measurement for each of a plurality of positions on a defective semiconductor device and waveform data obtained by the optical measurement for each of a plurality of positions on a non-defective semiconductor device, a calculation unit that calculates a degree of correspondence between the waveform data of the defective semiconductor device and the waveform data of the non-defective semiconductor device, and an analysis unit that analyzes a defective part of the defective semiconductor device on the basis of the degree of correspondence for each of the plurality of positions.

An optical probe includes a core part and a clad part arranged along an outer circumference of the core part, and has an incident surface having a radius of curvature R through which an optical signal enters. The radius of curvature R and a central half angle ω at an incident point of the optical signal on the incident surface fulfil the following formulae using a radiation angle γ of the optical signal, an effective incident radius Se of the optical signal transmitted in the core part without penetrating into the clad part on the incident surface, a refractive index n(r) of the core part at the incident point, and a refracting angle β at the incident point:

R=Se/sin(ω)

ω=±sin.sup.−1{[K2.sup.2/(K1.sup.2+K2.sup.2)].sup.1/2}

where K1=n(r)×cos(β)−cos(γ/2) and K2=n(r)×sin(β)−sin(γ/2).

An optical probe includes a core part and a clad part arranged along an outer circumference of the core part, and has an incident surface having a radius of curvature R through which an optical signal enters. The radius of curvature R and a central half angle ω at an incident point of the optical signal on the incident surface fulfil the following formulae using a radiation angle γ of the optical signal, an effective incident radius Se of the optical signal transmitted in the core part without penetrating into the clad part on the incident surface, a refractive index n(r) of the core part at the incident point, and a refracting angle β at the incident point:

R=Se/sin(ω)

ω=±sin.sup.−1{[K2.sup.2/(K1.sup.2+K2.sup.2)].sup.1/2}

where K1=n(r)×cos(β)−cos(γ/2) and K2=n(r)×sin(β)−sin(γ/2).

A plasma probe device includes: an antenna installed in an opening portion formed in a wall of a processing container via a seal member that seals between a vacuum space and an atmospheric space; and a light transmission portion installed inside the antenna or forming at least a portion of the antenna, and configured to transmit emission of plasma generated in the vacuum space to the atmospheric space.

There is disclosed a probe used with a measurement instrument including a pulse circuit for generating pulses. A coaxial connector is secured to the probe case so that the probe case is electrically connected to the ground shield. A center rod has a top end received in the probe case and to extend into a process liquid. The center rod is electrically connected to the center terminal for conducting the pulses. Ground rods are spaced around the center rod and are secured to the probe case. The probe provides an open configuration less susceptible to build-up between the center rod and the ground rods. One or more of the ground rods may by tubes, connected to a flushing port, with nozzles for cleaning the enter rod. Another ground rod may be tubular for carrying a conductor connected to a bottom of the center rod for bottom-up measurement.

There is disclosed a probe used with a measurement instrument including a pulse circuit for generating pulses. A coaxial connector is secured to the probe case so that the probe case is electrically connected to the ground shield. A center rod has a top end received in the probe case and to extend into a process liquid. The center rod is electrically connected to the center terminal for conducting the pulses. Ground rods are spaced around the center rod and are secured to the probe case. The probe provides an open configuration less susceptible to build-up between the center rod and the ground rods. One or more of the ground rods may by tubes, connected to a flushing port, with nozzles for cleaning the enter rod. Another ground rod may be tubular for carrying a conductor connected to a bottom of the center rod for bottom-up measurement.

A system may include a printed circuit board with a microstrip and a conductive structure surrounding the microstrip. The system may include a probe lead in communication with the conductive structure. The system may include a first contact pad electrically connected to the conductive structure and a second contact pad electrically connected to the conductive structure.

A system may include a printed circuit board with a microstrip and a conductive structure surrounding the microstrip. The system may include a probe lead in communication with the conductive structure. The system may include a first contact pad electrically connected to the conductive structure and a second contact pad electrically connected to the conductive structure.

Arrangements and techniques for testing mobile devices within a test module. The test modules are portable and may be stacked to provide a modular testing system. A pulley system may be used to move an actuator arm horizontally in the X and Y directions. The actuator arm may be moved vertically in the Z direction such that a tip may engage a touchscreen of a mobile device being tested or a user interface element of the mobile device.

Arrangements and techniques for testing mobile devices within a test module. The test modules are portable and may be stacked to provide a modular testing system. A pulley system may be used to move an actuator arm horizontally in the X and Y directions. The actuator arm may be moved vertically in the Z direction such that a tip may engage a touchscreen of a mobile device being tested or a user interface element of the mobile device.