H
ELECTRICITY
H
ELECTRICITY
H01
ELECTRIC ELEMENTS
H01
ELECTRIC ELEMENTS
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/04
the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
H01L21/04
the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
H01L21/18
the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
H01L21/18
the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
H01L21/30
Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
H01L21/30
Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
H01L21/31
to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
H01L21/31
to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
H01L21/3105
After-treatment
H01L21/3105
After-treatment
H01L21/311
Etching the insulating layers; by chemical or physical means
H01L21/311
Etching the insulating layers; by chemical or physical means
H01L21/31105
Etching inorganic layers
H01L21/31105
Etching inorganic layers