Patent classifications
H01L27/14654
Photoelectric conversion apparatus and imaging system
An apparatus includes a plurality of pixels and a plurality of microlenses. Each of the pixels has a first conversion unit and a second conversion unit surrounding the first conversion unit. The first conversion unit and the second conversion unit each have a light portion to receive light from a corresponding microlens. The first conversion unit and the second conversion unit are under the corresponding microlens. The pixels includes two or more pixels varying in an area ratio between an area of the light *portion of the first conversion unit and an area of the light portion of the second conversion unit.
SOLID-STATE IMAGING DEVICE AND IMAGING APPARATUS
A solid-state imaging device includes: a photoelectric conversion element that is disposed on a semiconductor substrate and generates signal charges by photoelectric conversion; a first diffusion layer that holds signal charges transferred from the photoelectric conversion element; a capacitive element that holds signal charges overflowing from the photoelectric conversion element; an amplifier transistor that outputs a signal according to the signal charges in the first diffusion layer; a first contact that is connected to the first diffusion layer; a second contact that is connected to a gate of the amplifier transistor; and a first wire that connects the first contact and the second contact. A shortest distance between the semiconductor substrate and the first wire is less than a shortest distance between the semiconductor substrate and the capacitive element.
IMAGE SENSOR
An image sensor includes a substrate including a first surface and a second surface facing the first surface, a first photodiode located in a first region of the substrate and generating photocharges from light incident on the first region, a second photodiode located in a second region of the substrate and generating photocharges from light incident on the second region, and an isolation structure defining the first region in which the first photodiode is located and the second region in which the second photodiode is located, and extending between the first photodiode and the second photodiode. An area of the second region is smaller than an area of the first region, a first end of the isolation structure is coplanar with the second surface, and the isolation structure extends in a vertical direction from the second surface of the substrate toward the first surface of the substrate.
UNEVEN-TRENCH PIXEL CELL AND FABRICATION METHOD
An uneven-trench pixel cell includes a semiconductor substrate that includes a floating diffusion region, a photodiode region, and, between a front surface and a back surface: a first sidewall surface, a shallow bottom surface, a second sidewall surface, and a deep bottom surface. The first sidewall surface and a shallow bottom surface define a shallow trench, located between the floating diffusion region and the photodiode region, that extends into the semiconductor substrate from the front surface. A shallow depth of the shallow trench exceeds a junction depth of the floating diffusion region. The second sidewall surface and a deep bottom surface define a deep trench, located between the floating diffusion region and the photodiode region, that extends into the semiconductor substrate from the front surface. A distance between the deep bottom surface and the front surface defines a deep depth, of the deep trench, that exceeds the shallow depth.
Solid-state imaging device and electronic apparatus
The present technology relates to a solid-state imaging device capable of suppressing deterioration in dark characteristics, and an electronic apparatus. The present invention is provided with: a photoelectric conversion section that performs photoelectric conversion; a charge retaining section that temporarily retains electric charge converted by the photoelectric conversion section; and a first trench formed in a semiconductor substrate between the photoelectric conversion section and the charge retaining section, the first trench being higher than the photoelectric conversion section in a depth direction of the semiconductor substrate. Alternatively, the first trench is lower than the photoelectric conversion section and higher than the charge retaining section in the depth direction of the semiconductor substrate. The present technology can be applied to, for example, a back-illuminated CMOS image sensor.
APPARATUS AND METHODS FOR BURIED CHANNEL TRANSFER GATE
An image sensor pixel may include a photodiode, a floating diffusion, and a transfer gate. A buried channel may be formed under the transfer gate. The buried channel may extend from the floating diffusion to overlap a portion of the transfer gate without extending completely beneath the transfer gate or reaching the photodiode. The buried channel may provide a path for antiblooming current from the photodiode to reach the floating diffusion, while allowing for the transfer gate off voltage to remain high enough to prevent transfer gate dark current from flowing into the photodiode.
Solid-state imaging device controlling read-out of signals from pixels in first and second areas
A solid-state imaging device includes a plurality of pixels each including a photoelectric conversion unit, a charge accumulating portion accumulating signal charges transferred from the photoelectric conversion unit, a floating diffusion portion accumulating signal charges transferred from the charge accumulating portion, and a read-out unit transferring signal charges from the charge accumulating portion to the floating diffusion portion and output a signal corresponding to the signal charges, and a control unit controlling the read-out unit to start, after starting read-out of signals of one frame from the charge accumulating portions, an accumulation of signal charges for a next frame at the photoelectric conversion units simultaneously, and to start, before completing the read-out of the signal of the one frame, an accumulation of signal charges at the charge accumulating portion of a pixel among the plurality of pixels from which the signal of the one frame is already read out.
Solid-state imaging device and control system
A solid-state imaging device is provided. The solid-state imaging device includes an imaging region having a plurality of pixels arranged on a semiconductor substrate, in which each of the pixels includes a photoelectric converting portion and a charge converting portion for converting a charge generated by photoelectric conversion into a pixel signal and blooming is suppressed by controlling a substrate voltage of the semiconductor substrate.
Image sensor and method of manufacturing the same
Image sensor and method of manufacturing the same are provided. The image sensor includes a semiconductor substrate including a pixel area, a voltage connection area, and a pad area, a plurality of photoelectric conversion devices in the pixel area, an anti-reflective layer on a back side of the semiconductor substrate and on the plurality of photoelectric conversion devices, a device isolation structure between the plurality of photoelectric conversion devices, at least one voltage connection structure in the voltage connection area, and electrically connected to the device isolation structure, at least one voltage applying device electrically connected to the at least one voltage connection structure, an internal circuit including at least one conductive inner wire and at least one conductive inner via in an insulating layer, and a through via structure in the pad area.
TIME OF FLIGHT IMAGING USING LONG AND SHORT-EXPOSURE STORAGE NODES
Examples are disclosed that relate to time of flight imaging using long-exposure and short-exposure storage nodes for each pixel tap of a pixel in an image sensor. One example provides a time-of-flight camera, comprising an image sensor comprising a plurality of pixels, each pixel of the plurality of pixels comprising one or more taps, each tap comprising a photogate, a short-exposure storage node configured to receive charge during a short-exposure interval of an integration period, a long-exposure storage node configured to receive charge during a long-exposure interval of the integration period, a short-exposure switch gate configured to direct charge generated during the short-exposure interval to the short-exposure storage node, a long-exposure switch gate configured to direct charge generated during the long-exposure period to the long-exposure storage node, and a readout mechanism comprising one or more floating diffusion capacitors.