Patent classifications
H01L31/1032
Systems and methods for thermal radiation detection
Systems and methods for thermal radiation detection utilizing a thermal radiation detection system are provided. The thermal radiation detection system includes one or more mercury-cadmium-telluride (HgCdTe)-based photodiode infrared detectors or Indium Antimonide (InSb)-based photodiode infrared detectors and a temperature sensing circuit. The temperature sensing circuit is configured to generate signals correlated to the temperatures of one or more of the plurality of infrared sensor elements. The thermal radiation detection system also includes a signal processing circuit.
LOW-STRESS DIELECTRIC LAYER, PLANARIZATION METHOD, AND LOW-TEMPERATURE PROCESSING FOR 3D-INTEGRATED ELECTRICAL DEVICE
An electrical device includes a substrate, a dielectric layer supported by the substrate, and an electrically conductive vertical interconnect extending through the dielectric layer. The dielectric layer may be formed at low-temperature below the thermal degradation temperature of thermally-sensitive material in the device. The dielectric layer may be a low-stress layer that imparts no stress or less stress than a failure stress of fragile material in the device. The dielectric layer may be formed during a processing step to planarize the electrical device at that step. The vertical interconnect may be diffusion bondable with another opposing interconnect at a low-temperature below the thermal degradation temperature of thermally-sensitive material in the device. The vertical interconnect may have a coefficient of thermal expansion (CTE) that is greater than a CTE of the dielectric layer to facilitate 3D-integration.
ALUMINUM NITRIDE PASSIVATION LAYER FOR MERCURY CADMIUM TELLURIDE IN AN ELECTRICAL DEVICE
An electrical device includes an aluminum nitride passivation layer for a mercury cadmium telluride (Hg.sub.1-xCd.sub.xTe) (MCT) semiconductor layer of the device. The AlN passivation layer may be an un-textured amorphous-to-polycrystalline film that is deposited onto the surface of the MCT in its as-grown state, or overlying the MCT after the MCT surface has been pre-treated or partially passivated, in this way fully passivating the MCT. The AlN passivation layer may have a coefficient of thermal expansion (CTE) that closely matches the CTE of the MCT layer, thereby reducing strain at an interface to the MCT. The AlN passivation layer may be formed with a neutral inherent (residual) stress, provide mechanical rigidity, and chemical resistance to protect the MCT.
ELECTRICAL DEVICE WITH STRESS BUFFER LAYER AND STRESS COMPENSATION LAYER
An electrical device includes a substrate with a compressive layer, a neutral stress buffer layer and a tensile stress compensation layer. The stress buffer layer and the stress compensation layer may each be formed with aluminum nitride using different processing parameters to provide a different intrinsic stress value for each layer. The aluminum nitride tensile layer is configured to counteract stresses from the compressive layer in the device to thereby control an amount of substrate bow in the device. This is useful for protecting fragile materials in the device, such as mercury cadmium telluride. The aluminum nitride stress compensation layer also can compensate for forces, such as due to CTE mismatches, to protect the fragile layer. The device may include temperature-sensitive materials, and the aluminum nitride stress compensation layer or stress buffer layer may be formed at a temperature below the thermal degradation temperature of the temperature-sensitive material.
Dual band photodiode element and method of making the same
Mercury cadmium telluride (MCT) dual band photodiode elements are described that include an n-type barrier region interposed between first and second p-type regions. The first p-type region is arranged to absorb different IR wavelengths to the second p-type region in order that the photodiode element can sense two IR bands. A portion of the second p-type region is type converted using ion-beam milling to produce a n-type region that interfaces with the second p-type region and the n-type barrier region.
ELECTRICAL CONTACT FABRICATION
In one aspect, a method includes forming an electrical path between p-type mercury cadmium telluride and a metal layer. The forming of the electrical path includes depositing a layer of polycrystalline p-type silicon directly on to the p-type mercury cadmium telluride and forming the metal layer on the layer of polycrystalline p-type silicon. In another aspect, an apparatus includes an electrical path. The electrical path includes a p-type mercury cadmium telluride layer, a polycrystalline p-type silicon layer in direct contact with the p-type mercury cadmium telluride layer, a metal silicide in direct contact with the polycrystalline p-type silicon layer, and an electrically conductive metal on the metal silicide. In operation, holes, indicative of electrical current on the electrical path, flow from the p-type mercury cadmium telluride layer to the electrically conductive metal.
Photodetection device having a lateral cadmium concentration gradient in the space charge zone
Photo-detection device (100) including a semiconductor substrate (110) made of Cd.sub.xHg.sub.1-xTe, with an N-doped region (120), a P-doped region (130), and a concentrated casing (150) only located in the P-doped region and having an average cadmium concentration greater than the average cadmium concentration in the N-doped region. According to the invention, the concentrated casing (150) has a cadmium concentration gradient, defining therein at least one intermediate gap zone (151) and at least one high gap zone (152), and the intermediate gap zone (151) is in direct physical contact with an electrical contact block (170). A significant reduction in the dark current and an optimal charge carrier collection are thus combined.
Semiconductor structure with two optically coupled optical resonant cavities and method of manufacturing such a structure
The invention relates to a semiconductor structure intended to receive an electromagnetic wave. The semiconductor structure comprises at least one first semiconductor resonant optical cavity conformed to absorb at least partially the electromagnetic wave and to provide an electrical signal proportional to the part of the electromagnetic wave absorbed. The semiconductor structure further includes a second dielectric resonant optical cavity of which a resonance wavelength is comprised in the predetermined range of wavelengths and is preferentially equal to the wavelength λ.sub.0, the second resonant optical cavity being laid out to intercept at least part of the electromagnetic wave and being optically coupled to the first resonant optical cavity. The second resonant optical cavity is transparent to the predetermined range of wavelengths. The invention further relates to a semiconductor component comprising such a semiconductor structure and a method of manufacturing such a semiconductor structure.
FLEXIBLE OR STRETCHABLE SENSOR FOR USE IN DETECTING A SUBSTANCE AND/OR ELECTROMAGNETIC RADIATION, AND A METHOD FOR DETECTING THEREOF
In general, this disclosure is directed to a flexible or stretchable sensor and a method of detecting a substance and/or electromagnetic radiation using said sensor. The sensor comprises a flexible or stretchable substrate, a pair of terminal electrodes disposed on the flexible or stretchable substrate in mutually spaced apart and opposing relation, and a sensing element applied to the flexible or stretchable substrate, between and in electrical contact with the pair of terminal electrodes, wherein the sensing element is responsive to a substance and/or electromagnetic radiation impinging thereon, and wherein when a voltage is applied across the sensor, an electrical signal is generated that is proportional to a resistance value corresponding to a sensing of the substance and/or electromagnetic radiation impinging on the sensing element.
PHOTODETECTION DEVICE WITH OVERDOPED INTERDIODE NETWORK AND MANUFACTURING METHOD
The invention relates to a photodetection device comprising a substrate and a diodes network, the substrate comprising an absorption layer (1) and each diode comprising a collection region with a first type of doping in the absorption layer (2). The device comprises a conduction mesh (7) under the surface of the substrate, comprising at least one conduction channel inserted between the collection regions (2) of two adjacent diodes, the at least one conduction channel (7) having a second doping type opposite the first type and a higher doping density than the absorption layer. The doping density of the at least one conduction channel (7) is derived from metal diffusion in the absorption layer from a metal mesh present on the substrate surface. The absorption layer has the first doping type. The invention also relates to a method of making such a device.