Power chip packaging structure
12538832 ยท 2026-01-27
Assignee
Inventors
- Chung-Hsiao Lien (Taipei, TW)
- Wei-Ming Lu (Taipei, TW)
- Jia-Yi Wu (Taipei, TW)
- Zzu-Chi Chiu (Taipei, TW)
Cpc classification
H10W72/5475
ELECTRICITY
H10W72/5445
ELECTRICITY
International classification
Abstract
A power chip packaging structure includes: a ceramic substrate; a first and a second top metal layers are formed on the ceramic substrate; a bottom metal layer formed on the ceramic substrate; a power chip having an active surface and a chip back surface. The active surface has a contact pad, and the chip back surface is connected to the first top metal layer. One or more first copper layers are formed on the contact pad, a top surface of the first copper layer has a peripheral region and an arrangement region surrounded by the peripheral region. Multiple second copper layers are formed in the arrangement region and separated from each other. Each of multiple wires is respectively connected to the second copper layer with one end and connected to the second top metal layer with the other end.
Claims
1. A power chip packaging structure comprising: a ceramic substrate; a first top metal layer formed on a top surface of the ceramic substrate; a second top metal layer formed on the top surface of the ceramic substrate and separated from the first top metal layer; a bottom metal layer formed on a bottom surface of the ceramic substrate; a power chip having an active surface and a chip back surface, wherein the active surface has a contact pad, and the chip back surface is connected to the first top metal layer; at least one first copper layer formed on the contact pad, wherein a top surface of the at least one first copper layer has a peripheral region and an arrangement region, the peripheral region surrounds the arrangement region, and the peripheral region is defined as a region that extends inward from a periphery of the at least one first copper layer by at least 0.025 mm; a plurality of second copper layers formed in the arrangement region of the at least one first copper layer and separated from each other, wherein a ratio of a thickness of each of the second copper layers to a thickness of the at least one first copper layer is in a range between 2 and 20; and a plurality of wires, wherein one end of two ends of each of the wires is connected to one of the second copper layers, and the other end of each of the wires is connected to the second top metal layer.
2. The power chip package structure according to claim 1, wherein the number of the at least one first copper layer is one, the number of the second copper layers is the same as the number of the wires, each of the second copper layers corresponds to a corresponding one of the wires, the one end of each of the wires is connected to the corresponding one of the second copper layers, and the other end of each of the wires is connected to the second top metal layer.
3. The power chip package structure according to claim 2, wherein a ratio of an area of the first copper layer to an area of the contact pad is in a range between 0.5 and 0.95, and a ratio of an area of each of the second copper layers to the area of the first copper layer is in a range between 0.05 and 0.5.
4. The power chip package structure according to claim 2, wherein a distance between two of the second copper layers adjacent to each other is greater than or equal to 0.1 mm.
5. The power chip package structure according to claim 1, wherein the number of the at least one first copper layer is one, the number of the second copper layers is less than the number of the wires, each of the second copper layers corresponds to one of the wires, the one end of each of the wires is connected to the one of the second copper layers, and the other end of each of the wires is connected to the second top metal layer.
6. The power chip package structure according to claim 5, wherein a ratio of an area of the first copper layer to an area of the contact pad is in a range between 0.5 and 0.95, and a ratio of an area of each of the second copper layers to the area of the first copper layer is in a range between 0.05 and 0.25.
7. The power chip package structure according to claim 5 wherein a distance between two of the second copper layers adjacent to each other is greater than or equal to 0.1 mm.
8. The power chip package structure according to claim 1, wherein the number of the at least one first copper layer is one, the number of the second copper layers is less than the number of the wires, each of the second copper layers corresponds the same number of the wires, the one end of each of at least two of the wires is connected to a corresponding one of the second copper layers, and the other end of each of the wires is connected to the second top metal layer.
9. The power chip package structure according to claim 8, wherein a ratio of an area of the first copper layer to an area of the contact pad is in a range between 0.5 and 0.95, and a ratio of an area of each of the second copper layers to the area of the first copper layer is in a range between 0.05 and 0.5.
10. The power chip package structure according to claim 8, wherein a distance between two of the second copper layers adjacent to each other is greater than or equal to 0.1 mm.
11. The power chip package structure according to claim 1, wherein the number of the at least one first copper layer is more than one, the number of the first copper layers, the number of the second copper layers, and the number of the wires are the same, each of the first copper layers corresponds to a corresponding one of the second copper layers, each of the second copper layers corresponds to a corresponding one of the wires, an area of each of the first copper layers is greater than an area of the corresponding one of the second copper layers, the one end of the each of the wires is connected to the corresponding one of the second copper layers, and the other end of each of the wires is connected to the second top metal layer.
12. The power chip package structure according to claim 11, wherein a ratio of an area of the first copper layer to an area of the contact pad is in a range between 0.05 and 0.5, and a ratio of an area of each of the second copper layers to the area of the first copper layer is in a range between 0.5 and 0.95.
13. The power chip package structure according to claim 11, wherein a distance between two of the second copper layers adjacent to each other is greater than or equal to 0.1 mm.
14. The power chip package structure according to claim 1, wherein the number of the at least one first copper layer is more than one, at least two of the second copper layers are formed on a corresponding one of the first copper layers, the number of the second copper layers is the same as the number of the wires, each of the second copper layers corresponds to a corresponding one of the wires, the one end of each of the wires is connected to a corresponding one of the second copper layers, and the other end of each of the wires is connected to the second top metal layer.
15. The power chip package structure according to claim 14, wherein a ratio of an area of the first copper layer to an area of the contact pad is in a range between 0.2 and 0.5, and a ratio of an area of each of the second copper layers to the area of the first copper layer is in a range between 0.05 and 0.4.
16. The power chip package structure according to claim 14, wherein a distance between two of the second copper layers adjacent to each other is greater than or equal to 0.1 mm.
17. The power chip package structure according to claim 1, wherein the number of the at least one first copper layer is equal to the number of the second copper layers, each of the first copper layers corresponds to a corresponding one of the second copper layers, the number of the second copper layers is less than the number of the wires, each of the second copper layers corresponds the same number of the wires, the one end of each of at least two of the wires is connected to a corresponding one of the second copper layers, and the other end of each of the wires is connected to the second top metal layer.
18. The power chip package structure according to claim 17, wherein a ratio of an area of the first copper layer to an area of the contact pad is in a range between 0.2 and 0.5, and a ratio of an area of each of the second copper layers to the area of the first copper layer is in a range between 0.5 and 0.95.
19. The power chip package structure according to claim 17, wherein a distance between two of the second copper layers adjacent to each other is greater than or equal to 0.1 mm.
20. The power chip package structure according to claim 1, wherein a distance between two of the second copper layers adjacent to each other is greater than or equal to 0.1 mm.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The disclosure will become more fully understood from the detailed description given herein below for illustration only, and thus not limitative of the disclosure, wherein:
(2)
(3)
(4)
(5)
(6)
(7)
(8)
DETAILED DESCRIPTION
(9)
(10) As shown in
(11) In this embodiment, a fixed distance D3 is existed between two adjacent of second copper layers 16 to ensure the current is distributed uniformly, for example the distance D3 is 0.1 mm (4 mil). Moreover, the thickness of the second copper layer 16 for directly withstanding the wire bonding stress should be thicker than the thickness of the first copper layer 15, so that the wire bonding stress can be properly distributed to prevent the damage of the power chip 14. Table (1) to Table (3) show the stress distribution performances for the second copper layers 16 and the first copper layer 15 with different thicknesses, where the arrangement relationship between the second copper layers 16 and the first copper layer 15 is shown in
(12) TABLE-US-00001 TABLE 1 Thickness of the Thickness of the second copper first copper Stress Total layer layer distribution thickness (m) (m) performance (m) Ratio 20 180 Passable 200 0.11 40 160 Passable 200 0.25 60 140 Passable 200 0.43 80 120 Passable 200 0.67 100 100 Good 200 1 120 80 Good 200 1.5 140 60 Good 200 2.33 160 40 Good 200 4 180 20 Good 200 9 190 10 Good 200 19
(13) TABLE-US-00002 TABLE 2 Thickness of the Thickness of the second copper first copper Stress Total layer layer distribution thickness (m) (m) performance (m) Ratio 10 140 Not good 150 0.07 20 130 Not good 150 0.15 30 120 Not good 150 0.25 40 110 Not good 150 0.36 50 100 Not good 150 0.5 60 90 Not good 150 0.67 70 80 Not good 150 0.875 80 70 Passable 150 1.14 90 60 Passable 150 1.5 100 50 Good 150 2 110 40 Good 150 2.75 120 30 Good 150 4 130 20 Good 150 6.5 140 10 Good 150 14
(14) TABLE-US-00003 TABLE 3 Thickness of the Thickness of the second copper first copper Stress Total layer layer distribution thickness (m) (m) performance (m) Ratio 10 90 Not good 100 0.11 20 80 Not good 100 0.25 30 70 Not good 100 0.43 40 60 Not good 100 0.67 50 50 Not good 100 1 60 40 Passable 100 1.5 70 30 Passable 100 2.33 75 25 Good 100 3 80 20 Good 100 4 90 10 Good 100 9
(15) As shown in Table (1), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 200 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 1, the stress distribution performance is optimal. From the experimental data, even if the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is 20, a proper stress distribution performance can be still obtained. As shown in Table (2), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 150 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 2, the stress distribution performance is optimal. As shown in Table (3), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 100 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 3, the stress distribution performance is optimal. Based on the aforementioned experimental results, under the condition that the total thickness of the first copper layer 15 and the second copper layer 16 is fixed, if the second copper layer 16 is thicker than the first copper layer 15, a better stress distribution performance can be obtained. The primary speculation for the result is that, upon the formation of the first copper layer 15 and the second copper layers 16, the internal stress is retained; moreover, an area of the first copper layer 15 is greater than an area of the second copper layer 16, and the first copper layer 15 is directly formed on the surface of the contact pad 143, therefore, if the first copper layer 15 is thicker than the second copper layer 16, the internal stress applied to the power chip 14 will be bigger, thus causing the power chip 14 to be damaged easily upon withstanding the impact of the wire bonding.
(16) As stated above, in the case that the arrangement relationship between the second copper layers 16 and the first copper layer 15 is shown in
(17)
(18) Table (4) to Table (6) show the stress distribution performances for the second copper layers 16 and the first copper layer 15 with different thicknesses, where the arrangement relationship between the second copper layers 16 and the first copper layer 15 is shown in
(19) TABLE-US-00004 TABLE (4) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 20 180 Passable 200 0.11 40 160 Passable 200 0.25 60 140 Passable 200 0.43 80 120 Passable 200 0.67 100 100 Good 200 1 120 80 Good 200 1.5 140 60 Good 200 2.33 160 40 Good 200 4 180 20 Good 200 9 190 10 Good 200 19
(20) TABLE-US-00005 TABLE (5) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 10 140 Not good 150 0.07 20 130 Not good 150 0.15 30 120 Not good 150 0.25 40 110 Not good 150 0.36 50 100 Not good 150 0.5 60 90 Not good 150 0.67 70 80 Not good 150 0.875 80 70 Passable 150 1.14 90 60 Passable 150 1.5 100 50 Good 150 2 110 40 Good 150 2.75 120 30 Good 150 4 130 20 Good 150 6.5 140 10 Good 150 14
(21) TABLE-US-00006 TABLE (6) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 10 90 Not good 100 0.11 20 80 Not good 100 0.25 30 70 Not good 100 0.43 40 60 Not good 100 0.67 50 50 Not good 100 1 60 40 Passable 100 1.5 70 30 Passable 100 2.33 75 25 Good 100 3 80 20 Good 100 4 90 10 Good 100 9
(22) As shown in Table (4), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 200 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 1, the stress distribution performance is optimal. As shown in Table (5), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 150 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 2, the stress distribution performance is optimal. As shown in Table (6), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 100 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 3, the stress distribution performance is optimal. The experimental results of Table (4) to Table (6) are consistent with the experimental results of Table (1) to Table (3), that is, under the condition that the total thickness of the first copper layer 15 and the second copper layer 16 is fixed, if the second copper layer 16 is thicker than the first copper layer 15, a better stress distribution performance can be obtained.
(23) As stated above, in the case that the arrangement relationship between the second copper layers 16 and the first copper layer 15 is shown in
(24)
(25) Table (7) to Table (9) show the stress distribution performances for the second copper layers 16 and the first copper layer 15 with different thicknesses, where the arrangement relationship between the second copper layers 16 and the first copper layer 15 is shown in
(26) TABLE-US-00007 TABLE (7) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 20 180 Passable 200 0.11 40 160 Passable 200 0.25 60 140 Passable 200 0.43 80 120 Passable 200 0.67 100 100 Good 200 1 120 80 Good 200 1.5 140 60 Good 200 2.33 160 40 Good 200 4 180 20 Good 200 9 190 10 Good 200 19
(27) TABLE-US-00008 TABLE (8) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 10 140 Not good 150 0.07 20 130 Not good 150 0.15 30 120 Not good 150 0.25 40 110 Not good 150 0.36 50 100 Not good 150 0.5 60 90 Not good 150 0.67 70 80 Passable 150 0.875 80 70 Passable 150 1.14 90 60 Good 150 1.5 100 50 Good 150 2 110 40 Good 150 2.75 120 30 Good 150 4 130 20 Good 150 6.5 140 10 Good 150 14
(28) TABLE-US-00009 TABLE (9) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 10 90 Not good 100 0.11 20 80 Not good 100 0.25 30 70 Not good 100 0.43 40 60 Not good 100 0.67 50 50 Passable 100 1 60 40 Passable 100 1.5 70 30 Good 100 2.33 75 25 Good 100 3 80 20 Good 100 4 90 10 Good 100 9
(29) As shown in Table (7), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 200 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 1, the stress distribution performance is optimal. As shown in Table (8), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 150 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 1.5, the stress distribution performance is optimal. As shown in Table (9), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 100 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 2.33, the stress distribution performance is optimal. The experimental results of Table (7) to Table (9) are consistent with the experimental results of Table (1) to Table (6), that is, under the condition that the total thickness of the first copper layer 15 and the second copper layer 16 is fixed, if the second copper layer 16 is thicker than the first copper layer 15, a better stress distribution performance can be obtained.
(30) As stated above, in the case that the arrangement relationship between the second copper layers 16 and the first copper layer 15 is shown in
(31)
(32) Table (10) to Table (12) show the stress distribution performances for the second copper layers 16 and the first copper layers 15 with different thicknesses, where the arrangement relationship between the second copper layers 16 and the first copper layers 15 is shown in
(33) TABLE-US-00010 TABLE (10) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 20 180 Passable 200 0.11 40 160 Passable 200 0.25 60 140 Passable 200 0.43 80 120 Passable 200 0.67 100 100 Passable 200 1 120 80 Good 200 1.5 140 60 Good 200 2.33 160 40 Good 200 4 180 20 Good 200 9 190 10 Good 200 19
(34) TABLE-US-00011 TABLE (11) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 10 140 Not good 150 0.07 20 130 Not good 150 0.15 30 120 Not good 150 0.25 40 110 Not good 150 0.36 50 100 Not good 150 0.5 60 90 Not good 150 0.67 70 80 Not good 150 0.875 80 70 Not good 150 1.14 90 60 Passable 150 1.5 100 50 Good 150 2 110 40 Good 150 2.75 120 30 Good 150 4 130 20 Good 150 6.5 140 10 Good 150 14
(35) TABLE-US-00012 TABLE (12) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 10 90 Not good 100 0.11 20 80 Not good 100 0.25 30 70 Not good 100 0.43 40 60 Not good 100 0.67 50 50 Not good 100 1 60 40 Not good 100 1.5 70 30 Passable 100 2.33 75 25 Passable 100 3 80 20 Good 100 4 90 10 Good 100 9
(36) As shown in Table (10), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 200 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 1.5, the stress distribution performance is optimal. As shown in Table (11), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 150 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 2, the stress distribution performance is optimal. As shown in Table (12), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 100 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 4, the stress distribution performance is optimal. The experimental results of Table (10) to Table (12) are consistent with the experimental results of Table (1) to Table (9), that is, under the condition that the total thickness of the first copper layer 15 and the second copper layer 16 is fixed, if the second copper layer 16 is thicker than the first copper layer 15, a better stress distribution performance can be obtained.
(37) As stated above, in the case that the arrangement relationship between the second copper layers 16 and the first copper layers 15 is shown in
(38)
(39) Table (13) to Table (15) show the stress distribution performances for the second copper layers 16 and the first copper layers 15 with different thicknesses, where the arrangement relationship between the second copper layers 16 and the first copper layers 15 is shown in
(40) TABLE-US-00013 TABLE (13) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 20 180 Passable 200 0.11 40 160 Passable 200 0.25 60 140 Passable 200 0.43 80 120 Passable 200 0.67 100 100 Good 200 1 120 80 Good 200 1.5 140 60 Good 200 2.33 160 40 Good 200 4 180 20 Good 200 9 190 10 Good 200 19
(41) TABLE-US-00014 TABLE (14) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 10 140 Not good 150 0.07 20 130 Not good 150 0.15 30 120 Not good 150 0.25 40 110 Not good 150 0.36 50 100 Not good 150 0.5 60 90 Not good 150 0.67 70 80 Not good 150 0.875 80 70 Passable 150 1.14 90 60 Passable 150 1.5 100 50 Good 150 2 110 40 Good 150 2.75 120 30 Good 150 4 130 20 Good 150 6.5 140 10 Good 150 14
(42) TABLE-US-00015 TABLE (15) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 10 90 Not good 100 0.11 20 80 Not good 100 0.25 30 70 Not good 100 0.43 40 60 Not good 100 0.67 50 50 Not good 100 1 60 40 Passable 100 1.5 70 30 Passable 100 2.33 75 25 Good 100 3 80 20 Good 100 4 90 10 Good 100 9
(43) As shown in Table (13), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 200 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 1, the stress distribution performance is optimal. As shown in Table (14), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 150 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 2, the stress distribution performance is optimal. As shown in Table (15), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 100 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 3, the stress distribution performance is optimal. The experimental results of Table (13) to Table (15) are consistent with the experimental results of Table (1) to Table (12), that is, under the condition that the total thickness of the first copper layer 15 and the second copper layer 16 is fixed, if the second copper layer 16 is thicker than the first copper layer 15, a better stress distribution performance can be obtained.
(44) As stated above, in the case that the arrangement relationship between the second copper layers 16 and the first copper layers 15 is shown in
(45)
(46) Table (16) to Table (18) show the stress distribution performances for the second copper layers 16 and the first copper layers 15 with different thicknesses, where the arrangement relationship between the second copper layers 16 and the first copper layers 15 is shown in
(47) TABLE-US-00016 TABLE (16) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 20 180 Passable 200 0.11 40 160 Passable 200 0.25 60 140 Passable 200 0.43 80 120 Passable 200 0.67 100 100 Good 200 1 120 80 Good 200 1.5 140 60 Good 200 2.33 160 40 Good 200 4 180 20 Good 200 9 190 10 Good 200 19
(48) TABLE-US-00017 TABLE (17) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 10 140 Not good 150 0.07 20 130 Not good 150 0.15 30 120 Not good 150 0.25 40 110 Not good 150 0.36 50 100 Not good 150 0.5 60 90 Not good 150 0.67 70 80 Passable 150 0.875 80 70 Passable 150 1.14 90 60 Good 150 1.5 100 50 Good 150 2 110 40 Good 150 2.75 120 30 Good 150 4 130 20 Good 150 6.5 140 10 Good 150 14
(49) TABLE-US-00018 TABLE (18) Thickness of the Thickness of the Stress Total second copper layer first copper layer distribution thickness (m) (m) performance (m) Ratio 10 90 Not good 100 0.11 20 80 Not good 100 0.25 30 70 Not good 100 0.43 40 60 Not good 100 0.67 50 50 Passable 100 1 60 40 Passable 100 1.5 70 30 Good 100 2.33 75 25 Good 100 3 80 20 Good 100 4 90 10 Good 100 9
(50) As shown in Table (16), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 200 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 1, the stress distribution performance is optimal. As shown in Table (17), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 150 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 1.5, the stress distribution performance is optimal. As shown in Table (18), in the case that the total thickness of the second copper layer 16 and the first copper layer 15 is 100 m, when the ratio of the thickness of the second copper layer 16 to the thickness of the first copper layer 15 is greater than or equal to 2.33, the stress distribution performance is optimal. The experimental results of Table (16) to Table (18) are consistent with the experimental results of Table (1) to Table (15), that is, under the condition that the total thickness of the first copper layer 15 and the second copper layer 16 is fixed, if the second copper layer 16 is thicker than the first copper layer 15, a better stress distribution performance can be obtained.
(51) As stated above, in the case that the arrangement relationship between the second copper layers 16 and the first copper layers 15 is shown in
(52) In the aforementioned embodiments, the material of the first top metal layer 12A, the second top metal layer 12B, the bottom metal layer 13 of the ceramic substrate 11 is copper. In other embodiments, the material of the first top metal layer 12A, the second top metal layer 12B, the bottom metal layer 13 of the ceramic substrate 11 may be gold, silver, aluminum, or alloys thereof.
(53) In the aforementioned embodiments, the term distance indicates the shortest distance between edges of two adjacent objects.
(54) It is understood that the use of terms top/upper or bottom/lower in the contents of the description is only for the purpose of illustrating the technical contents of the disclosed embodiments or the relative relationships of the components, and is not intended to limit the absolute spatial position of the components. In other words, the embodiments illustrated in the description and drawings are provided to allow a person having ordinary skills in the art to realize the invention and are not provided to limit the claim scopes of the invention.