Embodiments described herein may be related to apparatuses, processes, and techniques related MIM capacitors that have a multiple trench structure to increase a charge density, where a dielectric of the MIM capacitor includes a perovskite-based material. In embodiments, a first electrically conductive layer may be coupled with a top metal layer of the MIM, and/or a second conductive layer may be coupled with a bottom metal layer of the MIM to reduce RC effects. Other embodiments may be described and/or claimed.

Disclosed are a high-temperature capacitive energy storage film having a structure in which graphene fluoride (GF) is sandwiched between aramid nanofibers (ANFs) and a method of manufacturing the same.

Disclosed are a high-temperature capacitive energy storage film having a structure in which graphene fluoride (GF) is sandwiched between aramid nanofibers (ANFs) and a method of manufacturing the same.

A deep trench is formed in a substrate. A layer stack including at least three metallic electrode layers interlaced with at least two node dielectric layers is formed over the substrate. The layer stack continuously extends into the deep trench, and a cavity is present in an unfilled volume of the deep trench. A dielectric fill material layer including a dielectric fill material is formed in the cavity and over the substrate. The dielectric fill material layer encapsulates a void that is free of any solid phase and is formed within a volume of the cavity. The void may expand or shrink under stress during subsequently handling of a deep trench capacitor including the layer stack to absorb mechanical stress and to increase mechanical stability of the deep trench capacitor.

A MIM structure and manufacturing method thereof are provided. The MIM structure includes a substrate and a metallization structure over the substrate. The metallization structure includes a bottom electrode layer, a dielectric layer on the bottom electrode layer, a ferroelectric layer on the dielectric layer, a top electrode layer on the ferroelectric layer, a first contact electrically coupled to the top electrode layer, and a second contact penetrating the dielectric layer and the ferroelectric layer, electrically coupled to a base portion of the bottom electrode layer. The bottom electrode layer includes the base portion and a plurality of protrusions, each of the protrusions is protruding from the base portion and leveled with a lower surface of the dielectric layer, each portion of the dielectric layer over the bottom electrode layer substantially have identical thicknesses.

A MIM structure and manufacturing method thereof are provided. The MIM structure includes a substrate and a metallization structure over the substrate. The metallization structure includes a bottom electrode layer, a dielectric layer on the bottom electrode layer, a ferroelectric layer on the dielectric layer, a top electrode layer on the ferroelectric layer, a first contact electrically coupled to the top electrode layer, and a second contact penetrating the dielectric layer and the ferroelectric layer, electrically coupled to a base portion of the bottom electrode layer. The bottom electrode layer includes the base portion and a plurality of protrusions, each of the protrusions is protruding from the base portion and leveled with a lower surface of the dielectric layer, each portion of the dielectric layer over the bottom electrode layer substantially have identical thicknesses.

A semiconductor device includes a semiconductor substrate having first and second main surfaces that oppose each other in a thickness direction, and a circuit layer disposed on the first main surface. The circuit layer includes a first electrode layer on a side of the semiconductor substrate, a second electrode layer that faces the first electrode layer, a dielectric layer disposed between the electrode layers, and a first outer electrode electrically connected to the first electrode layer through an opening in the dielectric layer. An end portion of the dielectric layer on a side of the first region is in contact with the first electrode layer, and in the dielectric layer, a size of the end portion in the thickness direction is smaller than a size of an inter-electrode portion between the first and second electrode layers in the thickness direction.

A semiconductor device having a semiconductor substrate with first and second main surfaces that face one another in a thickness direction, and a circuit layer disposed on the first main surface. The circuit layer has a first electrode layer on the semiconductor substrate, a dielectric layer on the first electrode layer, a second electrode layer on the dielectric layer, and first and second outer electrodes electrically connected to the first and second electrode layers, respectively. The semiconductor substrate has a first end-portion region in which the circuit layer is not provided on the semiconductor substrate and on the side of the first end surface. In the first end-portion region, a first exposed portion is provided that is exposed between the first main surface and the first end surface.

A semiconductor device having a semiconductor substrate with first and second main surfaces that face one another in a thickness direction, and a circuit layer disposed on the first main surface. The circuit layer has a first electrode layer on the semiconductor substrate, a dielectric layer on the first electrode layer, a second electrode layer on the dielectric layer, and first and second outer electrodes electrically connected to the first and second electrode layers, respectively. The semiconductor substrate has a first end-portion region in which the circuit layer is not provided on the semiconductor substrate and on the side of the first end surface. In the first end-portion region, a first exposed portion is provided that is exposed between the first main surface and the first end surface.

The present disclosure relates to a dielectric composite-based power reduction device. The power reduction device of the present disclosure is a dielectric composite-based power reduction device capable of high-efficiency power reduction via parallel connection to an input power supply. The power reduction is achieved by reactive power reduction based on a capacitor bank principle, a harmonic wave reduction by inductance, and an increase in active power efficiency. Disclosed are a composite electrode structure capable of achieving all of those, and an improvement in a performance based on a development of the composite.