H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/70
Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
H01L21/70
Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
H01L21/77
Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
H01L21/77
Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
H01L21/78
with subsequent division of the substrate into plural individual devices
H01L21/78
with subsequent division of the substrate into plural individual devices
H01L21/82
to produce devices, e.g. integrated circuits, each consisting of a plurality of components
H01L21/82
to produce devices, e.g. integrated circuits, each consisting of a plurality of components
H01L21/822
the substrate being a semiconductor, using silicon technology
H01L21/822
the substrate being a semiconductor, using silicon technology
H01L21/8234
MIS technology; , i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
H01L21/8234
MIS technology; , i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
H01L21/823481
isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure
H01L21/823481
isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure