Embodiments herein relate to systems, apparatuses, or processes directed to electrically coupled trench capacitors within a substrate. The substrate may be part of an interposer, such as a glass interposer, where the trench capacitors deliver a high capacitance density close to one or more dies that are attached to a surface of the substrate. Portions of the trench capacitor may be a thin film capacitor at a surface of the substrate. The trenches extend from a first side of the substrate toward a second side of the substrate opposite the first side. Other embodiments may be described and/or claimed.

Provided is a three-dimensional (3D) capacitor including conductors formed at a high density inside holes of an anodic oxide film, and a first electrode layer and a second electrode layer electrically connected to the conductors. Thus, a high capacitance relative to a size of the 3D capacitor may be easily achieved.

A metal-oxide-metal (MOM) capacitor is provided in the present invention. The MOM capacitor includes a capacitor element, wherein the capacitor element includes a first electrode and a second electrode. A projection of the first electrode includes a closed pattern in the vertical projection direction. A projection of the second electrode is surrounded by the closed pattern of the projection of the first electrode in the vertical projection direction.

In an embodiment, a multilayer ceramic capacitor 10 has a first external electrode 12 and a second external electrode 13 that each contain metal grains MP and dielectric grains DP, where an oxide of the same metal element constituting the metal grain MP, or MO, is present at the interface between the metal grain MP and the dielectric grain DP. The multilayer ceramic capacitor can prevent the hardness of its external electrodes from dropping, even when the external electrodes contain metal grains and dielectric grains.

In an embodiment, a multilayer ceramic capacitor 10 has a first external electrode 12 and a second external electrode 13 that each contain metal grains MP and dielectric grains DP, where an oxide of the same metal element constituting the metal grain MP, or MO, is present at the interface between the metal grain MP and the dielectric grain DP. The multilayer ceramic capacitor can prevent the hardness of its external electrodes from dropping, even when the external electrodes contain metal grains and dielectric grains.

In a thin-film capacitor, a first extraction electrode provided along a side surface of a first groove portion is in contact with a first electrode layer and is not in contact with a second electrode layer. Also, a second extraction electrode provided along a side surface of a second groove portion is in contact with the second electrode layer exposed on the side surface of the second groove portion and is not in contact with the first electrode layer. Thus, a capacitor structure in which the first electrode layer in contact with the first extraction electrode and the second electrode layer in contact with the second extraction electrode are laminated with a dielectric layer therebetween is formed between the first groove portion and the second groove portion.

In a thin-film capacitor, a first extraction electrode provided along a side surface of a first groove portion is in contact with a first electrode layer and is not in contact with a second electrode layer. Also, a second extraction electrode provided along a side surface of a second groove portion is in contact with the second electrode layer exposed on the side surface of the second groove portion and is not in contact with the first electrode layer. Thus, a capacitor structure in which the first electrode layer in contact with the first extraction electrode and the second electrode layer in contact with the second extraction electrode are laminated with a dielectric layer therebetween is formed between the first groove portion and the second groove portion.

In an embodiment, a multilayer ceramic capacitor 10 has a capacitor body comprising a capacitive part 11a constituted by multiple internal electrode layers 11al that are stacked with dielectric layers 11a2 in between, as well as dielectric cover parts 11b that respectively cover both sides of the capacitive part 11a in the stacking direction. Also, the dielectric layers 11a2 of the capacitive part 11a, and the dielectric cover parts 11b, contain elemental manganese, and the elemental manganese is distributed in such a way that its quantity gradually decreases in the depth direction from the exterior faces of the dielectric cover parts 11b toward the center of the dielectric layers 11a2 of the capacitive part 11a.

In an embodiment, a multilayer ceramic capacitor 10 has a capacitor body comprising a capacitive part 11a constituted by multiple internal electrode layers 11al that are stacked with dielectric layers 11a2 in between, as well as dielectric cover parts 11b that respectively cover both sides of the capacitive part 11a in the stacking direction. Also, the dielectric layers 11a2 of the capacitive part 11a, and the dielectric cover parts 11b, contain elemental manganese, and the elemental manganese is distributed in such a way that its quantity gradually decreases in the depth direction from the exterior faces of the dielectric cover parts 11b toward the center of the dielectric layers 11a2 of the capacitive part 11a.

In a width direction of a ceramic laminate, one end portion of a first internal electrode and one end portion of a second internal electrode each include metal phases of a Ni region, a Ni—O region, and a Ni—O—Mg region disposed in this order from a first internal electrode side and a second internal electrode side, respectively, to a first side surface of the ceramic laminate. The other end portion of the first internal electrode and the other end portion of the second internal electrode each include metal phases of a Ni region, a Ni—O region, and a Ni—O—Mg region disposed in this order from the first internal electrode side and the second internal electrode side, respectively, to a second side surface of the ceramic laminate.