Patent classifications
H01L29/78678
Thin film transistor and manufacturing method thereof and electronic device
A thin film transistor includes an active layer, a source electrode and a drain electrode. The active layer includes a conductive region and the conductive region is between the source electrode and the drain electrode and is spaced apart from at least one of the source electrode and the drain electrode.
Manufacturing method for array substrate and array substrate
The present disclosure discloses a manufacturing method for an array substrate and an array substrate. The method includes: forming a gate electrode, a gate insulating layer, a semiconductor layer, a source drain electrode layer and a photoresist layer on a substrate; patterning the photoresist layer to form a patterned photoresist layer; performing at least one wet etching on the source drain electrode layer and performing at least one dry etching on the semiconductor layer; performing an ashing processing between the steps of the wet etching and the dry etching. A ratio of a lateral etching rate to a longitudinal etching rate in the at least one ashing processing ranges from 1:0.9 to 1:1.5.
ORGANIC LIGHT-EMITTING DIODE DISPLAY
An organic light-emitting diode display is disclosed. In one aspect, the display includes a display unit located on the substrate and including a display area and a non-display area surrounding the display area, and a thin film encapsulation layer sealing the display unit. The display also includes a voltage line formed in the non-display area and surrounding the display area, a metal layer formed of the same material as the voltage line, and a dam surrounding the display area and contacting the voltage line. The voltage line includes a first voltage line disposed in one side of the display area. The first voltage line includes a pair of first end portions and a pair of first connectors respectively connected to the pair of first end portions and extending away from the display area. The metal layer is disposed between the pair of first connectors. The dam contacts the metal layer.
Strained thin film transistors
Strained thin film transistors are described. In an example, an integrated circuit structure includes a strain inducing layer on an insulator layer above a substrate. A polycrystalline channel material layer is on the strain inducing layer. A gate dielectric layer is on a first portion of the polycrystalline channel material. A gate electrode is on the gate dielectric layer, the gate electrode having a first side opposite a second side. A first conductive contact is adjacent the first side of the gate electrode, the first conductive contact on a second portion of the polycrystalline channel material. A second conductive contact adjacent the second side of the gate electrode, the second conductive contact on a third portion of the polycrystalline channel material.
Thin-film transistor embedded dynamic random-access memory with shallow bitline
Described herein are embedded dynamic random-access memory (eDRAM) memory cells and arrays, as well as corresponding methods and devices. An exemplary eDRAM memory array implements a memory cell that uses a thin-film transistor (TFT) as a selector transistor. One source/drain (S/D) electrode of the TFT is coupled to a capacitor for storing a memory state of the cell, while the other S/D electrode is coupled to a bitline. The bitline may be a shallow bitline in that a thickness of the bitline may be smaller than a thickness of one or more metal interconnects provided in the same metal layer as the bitline but used for providing electrical connectivity for components outside of the memory array. Such a bitline may be formed in a separate process than said one or more metal interconnects. In an embodiment, the memory cells may be formed in a back end of line process.
Liquid crystal display device
A method of manufacturing, with high mass productivity, liquid crystal display devices having highly reliable thin film transistors with excellent electric characteristics is provided. In a liquid crystal display device having an inverted staggered thin film transistor, the inverted staggered thin film transistor is formed as follows: a gate insulating film is formed over a gate electrode; a microcrystalline semiconductor film which functions as a channel formation region is formed over the gate insulating film; a buffer layer is formed over the microcrystalline semiconductor film; a pair of source and drain regions are formed over the buffer layer; and a pair of source and drain electrodes are formed in contact with the source and drain regions so as to expose a part of the source and drain regions.
Capping layer over FET FeRAM to increase charge mobility
In some embodiments, the present disclosure relates to an integrated chip that includes a gate electrode over a substrate, and a gate dielectric layer arranged over the gate electrode. The gate dielectric layer includes a ferroelectric material. An active structure is arranged over the gate dielectric layer and includes a semiconductor material. A source contact and a drain contact are arranged over the active structure. A capping structure is arranged between the source and drain contacts and over the active structure. The capping structure includes a first metal material.
Semiconductor device and manufacturing method thereof
An oxide semiconductor layer which is intrinsic or substantially intrinsic and includes a crystalline region in a surface portion of the oxide semiconductor layer is used for the transistors. An intrinsic or substantially intrinsic semiconductor from which an impurity which is to be an electron donor (donor) is removed from an oxide semiconductor and which has a larger energy gap than a silicon semiconductor is used. Electrical characteristics of the transistors can be controlled by controlling the potential of a pair of conductive films which are provided on opposite sides from each other with respect to the oxide semiconductor layer, each with an insulating film arranged therebetween, so that the position of a channel formed in the oxide semiconductor layer is determined.
MOS TRANSISTOR ISOLATED FROM THE SUBSTRATE OF AN INTEGRATED CIRCUIT AND APPLICATION FOR DETECTING AN OPENING OF A CLOSED CONTAINER
An integrated circuit includes a first substrate. A MOS transistor has a first polysilicon region electrically isolated from the first substrate and including a gate region. A second polysilicon region is electrically isolated from the first polysilicon region and from the first substrate. The second polysilicon region includes a source region, a substrate region and a drain region of the MOS transistor. The first polysilicon region is located between an area of the first substrate and the second polysilicon region.
Methods of manufacturing low-temperature polysilicon thin film and transistor
A method of manufacturing a low temperature polysilicon thin film includes: forming a buffer layer on a substrate; forming a gate electrode on the buffer layer; forming a patterned raising layer on the gate electrode, wherein the patterned raising layer covers a top surface and a lateral surface of the gate electrode; forming a first diffusion barrier layer on the patterned raising layer; forming a second diffusion barrier layer on the first diffusion barrier layer; forming a silicon layer on the second diffusion barrier layer; annealing the silicon layer to form a polysilicon layer, wherein the polysilicon layer includes a patterned area and a to-be-removed area, the patterned area has the same pattern with the patterned raising layer, and the patterned area is whole directly above the patterned raising layer; and in the polysilicon layer, removing the to-be-removed area, and keeping the patterned area.